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p-type Zn1-xMgxO Films with Sb Doping by Radio-Frequency Magnetron Sputtering
Wang P; Chen NF(陈诺夫); Yin ZG; Dai RX; Bai YM; Wang, P (reprint author), Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China.
Source PublicationApplied Physics Letters
2006
Volume89Issue:20Pages:Art.No.202102
ISSN0003-6951
AbstractSb-doped Zn1-xMgxO films were grown on c-plane sapphire ubstrates by radio-frequency magnetron sputtering. The p-type conduction of the films (0.05 <= x <= 0.13) was confirmed by Hall measurements, revealing a hole concentration of 10(15)-10(16) cm(-3) and a mobility of 0.6-4.5 cm(2)/V s. A p-n homojunction comprising an undoped ZnO layer and an Sb-doped Zn0.95Mg0.05O layer shows a typical rectifying characteristic. Sb-doped p-type Zn1-xMgxO films also exhibit a changeable wider band gap as a function of x, implying that they can probably be used for fabrication of ZnO-based quantum wells and ultraviolet optoelectronic devices. (c) 2006 American Institute of Physics.
Subject Area力学
DOI10.1063/1.2388254
Indexed BySCI ; EI
Language英语
WOS IDWOS:000242100200036
WOS KeywordZNO THIN-FILMS ; MGXZN1-XO ; DEVICES ; ALLOY
WOS Research AreaPhysics
WOS SubjectPhysics, Applied
Citation statistics
Cited Times:50[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/15399
Collection力学所知识产出(1956-2008)
Corresponding AuthorWang, P (reprint author), Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China.
Recommended Citation
GB/T 7714
Wang P,Chen NF,Yin ZG,et al. p-type Zn1-xMgxO Films with Sb Doping by Radio-Frequency Magnetron Sputtering[J]. Applied Physics Letters,2006,89,20,:Art.No.202102.
APA Wang P,陈诺夫,Yin ZG,Dai RX,Bai YM,&Wang, P .(2006).p-type Zn1-xMgxO Films with Sb Doping by Radio-Frequency Magnetron Sputtering.Applied Physics Letters,89(20),Art.No.202102.
MLA Wang P,et al."p-type Zn1-xMgxO Films with Sb Doping by Radio-Frequency Magnetron Sputtering".Applied Physics Letters 89.20(2006):Art.No.202102.
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