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IMECH-IR  > 力学所知识产出(1956-2008)
Residual Stresses in Micro-Electro-Mechanical Systems
Qian J(钱劲); Liu C(刘澄); Zhang DC(张大成)
Source Publication机械强度
2001
Issue4Pages:393-401
ISSN1001-9669
Subject Area力学
Indexed ByEI ; CSCD
Language英语
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Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/15692
Collection力学所知识产出(1956-2008)
Recommended Citation
GB/T 7714		 Qian J,Liu C,Zhang DC. Residual Stresses in Micro-Electro-Mechanical Systems[J]. 机械强度,2001,4,:393-401.
APA 钱劲,刘澄,&张大成.(2001).Residual Stresses in Micro-Electro-Mechanical Systems.机械强度(4),393-401.
MLA 钱劲,et al."Residual Stresses in Micro-Electro-Mechanical Systems".机械强度 .4(2001):393-401.
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