Numerical Analysis of Theoretical Model of the Rf MEMs Switches

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	Numerical Analysis of Theoretical Model of the Rf MEMs Switches
	Zhang LX(张立宪); Yu TX(余同希); Zhao YP(赵亚溥); Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
发表期刊	Acta Mechanica Sinica
	2004
卷号	20 期号:2 页码:178-184
ISSN	0567-7718
摘要	An improved electromechanical model of the RF MEMS (radio frequency microelectromechanical systems) switches is introduced, in which the effects of intrinsic residual stress from fabrication processes, axial stress due to stretching of beam, and fringing field are taken into account. Four dimensionless numbers are derived from the governing equation of the developed model. A semi-analytical method is developed to calculate the behavior of the RF MEMS switches. Subsequently the influence of the material and geometry parameters on the behavior of the structure is analyzed and compared, and the corresponding analysis with the dimensionless numbers is conducted too. The quantitative relationship between the presented parameters and the critical pull-in voltage is obtained, and the relative importance of those parameters is given.
学科领域	力学
URL	查看原文
收录类别	SCI ; EI ; CSCD
语种	英语
WOS记录号	WOS:000221518600011
WOS研究方向	Engineering ; Mechanics
WOS类目	Engineering, Mechanical ; Mechanics
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/16053
专题	力学所知识产出(1956-2008)
通讯作者	Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Zhang LX,Yu TX,Zhao YP,et al. Numerical Analysis of Theoretical Model of the Rf MEMs Switches[J]. Acta Mechanica Sinica,2004,20,2,:178-184.
APA	Zhang LX,Yu TX,Zhao YP,&Zhao, YP .(2004).Numerical Analysis of Theoretical Model of the Rf MEMs Switches.Acta Mechanica Sinica,20(2),178-184.
MLA	Zhang LX,et al."Numerical Analysis of Theoretical Model of the Rf MEMs Switches".Acta Mechanica Sinica 20.2(2004):178-184.

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