Knowledge Management System of Institue of Mechanics, CAS
| Numerical Analysis of Theoretical Model of the Rf MEMs Switches | |
Zhang LX(张立宪); Yu TX(余同希); Zhao YP(赵亚溥) ; Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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| Source Publication | Acta Mechanica Sinica
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| 2004 | |
| Volume | 20Issue:2Pages:178-184 |
| ISSN | 0567-7718 |
| Abstract | An improved electromechanical model of the RF MEMS (radio frequency microelectromechanical systems) switches is introduced, in which the effects of intrinsic residual stress from fabrication processes, axial stress due to stretching of beam, and fringing field are taken into account. Four dimensionless numbers are derived from the governing equation of the developed model. A semi-analytical method is developed to calculate the behavior of the RF MEMS switches. Subsequently the influence of the material and geometry parameters on the behavior of the structure is analyzed and compared, and the corresponding analysis with the dimensionless numbers is conducted too. The quantitative relationship between the presented parameters and the critical pull-in voltage is obtained, and the relative importance of those parameters is given. |
| Subject Area | 力学 |
| URL | 查看原文 |
| Indexed By | SCI ; EI ; CSCD |
| Language | 英语 |
| WOS ID | WOS:000221518600011 |
| WOS Research Area | Engineering ; Mechanics |
| WOS Subject | Engineering, Mechanical ; Mechanics |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/16053 |
| Collection | 力学所知识产出(1956-2008) |
| Corresponding Author | Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China. |
| Recommended Citation GB/T 7714 | Zhang LX,Yu TX,Zhao YP,et al. Numerical Analysis of Theoretical Model of the Rf MEMs Switches[J]. Acta Mechanica Sinica,2004,20,2,:178-184. |
| APA | Zhang LX,Yu TX,Zhao YP,&Zhao, YP .(2004).Numerical Analysis of Theoretical Model of the Rf MEMs Switches.Acta Mechanica Sinica,20(2),178-184. |
| MLA | Zhang LX,et al."Numerical Analysis of Theoretical Model of the Rf MEMs Switches".Acta Mechanica Sinica 20.2(2004):178-184. |
| Files in This Item: | Download All | |||||
| File Name/Size | DocType | Version | Access | License | ||
| Numerical Analysis o（479KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-ND | View Download | |
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