压阻式高量程微加速度计的冲击校准

IMECH-IR > 力学所知识产出(1956-2008)

	压阻式高量程微加速度计的冲击校准
Alternative Title	Shock calibration of piezoresistive high-g_n microaccelerometer
	郇勇; 张泰华; 杨业敏; 王钻开; 陆德仁
Source Publication	传感器技术
	2003
Volume	22 Issue:11 Pages:78-80
ISSN	1000-9787
Abstract	采用体硅微机械加工技术和扩散技术，制作压阻式高量程微加速度计，设计量程为50000 g_n。芯片材料为单晶硅，采用双列扁平陶瓷封装。为了测量其动态灵敏度，使用Hopkinson杆在约40000 g_n的加速度水平下进行了冲击校准。在电桥电压为6.33V的情况下，被测微加速度计的灵敏度为1.26 μV/g_n。
Keyword	微电子机械系统微加速度计 Hopkinson杆校准
Subject Area	力学
Indexed By	CSCD
Language	中文
CSCD ID	CSCD:1176396
Citation statistics
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/16172
Collection	力学所知识产出(1956-2008)
Recommended Citation GB/T 7714	郇勇,张泰华,杨业敏,等. 压阻式高量程微加速度计的冲击校准[J]. 传感器技术,2003,22,11,:78-80.
APA	郇勇,张泰华,杨业敏,王钻开,&陆德仁.(2003).压阻式高量程微加速度计的冲击校准.传感器技术,22(11),78-80.
MLA	郇勇,et al."压阻式高量程微加速度计的冲击校准".传感器技术 22.11(2003):78-80.

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