Knowledge Management System of Institue of Mechanics, CAS
| Failure modes of doubly supported capacitive RF MEMS switches | |
Zhang LX(张立宪); Zhang JW(张锦文); Zhao YP(赵亚溥) ; Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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| Source Publication | International Journal of Nonlinear Sciences and Numerical Simulation
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| 2002 | |
| Volume | 3Issue:3-4Pages:353-356 |
| ISSN | 1565-1339 |
| Abstract | For the design of radio frequency micro-electro-mechanical systems (RF MEMS) switches, the reliability issue becomes increasingly important. This paper represents some failure phenomena of doubly supported capacitive RF MEMS switches that include observable destruction failure and directly measurable parameter degradation obtained from the actuating-voltage testing and scanning electron microscope (SEM) observation. The relevant failure modes as well as their failure mechanisms are identified. |
| Subject Area | 力学 |
| URL | 查看原文 |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:000176903800043 |
| WOS Research Area | Engineering ; Mathematics ; Mechanics ; Physics |
| WOS Subject | Engineering, Multidisciplinary ; Mathematics, Applied ; Mechanics ; Physics, Mathematical |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/16441 |
| Collection | 力学所知识产出(1956-2008) |
| Corresponding Author | Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China. |
| Recommended Citation GB/T 7714 | Zhang LX,Zhang JW,Zhao YP,et al. Failure modes of doubly supported capacitive RF MEMS switches[J]. International Journal of Nonlinear Sciences and Numerical Simulation,2002,3,3-4,:353-356. |
| APA | Zhang LX,Zhang JW,Zhao YP,&Zhao, YP .(2002).Failure modes of doubly supported capacitive RF MEMS switches.International Journal of Nonlinear Sciences and Numerical Simulation,3(3-4),353-356. |
| MLA | Zhang LX,et al."Failure modes of doubly supported capacitive RF MEMS switches".International Journal of Nonlinear Sciences and Numerical Simulation 3.3-4(2002):353-356. |
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