Failure modes of doubly supported capacitive RF MEMS switches

IMECH-IR > 力学所知识产出(1956-2008)

	Failure modes of doubly supported capacitive RF MEMS switches
	Zhang LX(张立宪); Zhang JW(张锦文); Zhao YP(赵亚溥); Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
发表期刊	International Journal of Nonlinear Sciences and Numerical Simulation
	2002
卷号	3 期号:3-4 页码:353-356
ISSN	1565-1339
摘要	For the design of radio frequency micro-electro-mechanical systems (RF MEMS) switches, the reliability issue becomes increasingly important. This paper represents some failure phenomena of doubly supported capacitive RF MEMS switches that include observable destruction failure and directly measurable parameter degradation obtained from the actuating-voltage testing and scanning electron microscope (SEM) observation. The relevant failure modes as well as their failure mechanisms are identified.
学科领域	力学
URL	查看原文
收录类别	SCI
语种	英语
WOS记录号	WOS:000176903800043
WOS研究方向	Engineering ; Mathematics ; Mechanics ; Physics
WOS类目	Engineering, Multidisciplinary ; Mathematics, Applied ; Mechanics ; Physics, Mathematical
引用统计	被引频次：24[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/16441
专题	力学所知识产出(1956-2008)
通讯作者	Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Zhang LX,Zhang JW,Zhao YP,et al. Failure modes of doubly supported capacitive RF MEMS switches[J]. International Journal of Nonlinear Sciences and Numerical Simulation,2002,3,3-4,:353-356.
APA	Zhang LX,Zhang JW,Zhao YP,&Zhao, YP .(2002).Failure modes of doubly supported capacitive RF MEMS switches.International Journal of Nonlinear Sciences and Numerical Simulation,3(3-4),353-356.
MLA	Zhang LX,et al."Failure modes of doubly supported capacitive RF MEMS switches".International Journal of Nonlinear Sciences and Numerical Simulation 3.3-4(2002):353-356.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
ja360.pdf（1085KB）			开放获取	--	浏览下载