Knowledge Management System of Institue of Mechanics, CAS
| Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet | |
Pan WX(潘文霞) ; Lv FX(吕反修); Tang WZ(唐伟忠); Zhong GF(钟国仿); Jiang Z(蒋政); Wu CK(吴承康); Pan, WX (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100080, Peoples R China.
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| Source Publication | Diamond and Related Materials
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| 2000 | |
| Volume | 9Issue:9-10Pages:1682-1686 |
| ISSN | 0925-9635 |
| Abstract | A new DC plasma torch in which are jet states and deposition parameters can be regulated over a wide range has been built. It showed advantages in producing stable plasma conditions at a small gas flow rate. Plasma jets with and without magnetically rotated arcs could be generated. With straight are jet deposition, diamond films could be formed at a rate of 39 mu m/h on Mo substrates of Phi 25 mm, and the conversion rate of carbon in CH4 to diamond was less than 3%. Under magnetically rotated conditions, diamond films could be deposited uniformly in a range of Phi 40 mm at 30 mu m/h, with a quite low total gas flow rate and high carbon conversion rate of over 11%. Mechanisms of rapid and uniform deposition of diamond films with low gas consumption and high carbon transition efficiency are discussed. |
| Subject Area | 力学 |
| DOI | 10.1016/S0925-9635(00)00286-7 |
| Indexed By | SCI ; EI |
| Language | 英语 |
| WOS ID | WOS:000089203100025 |
| WOS Keyword | CHEMICAL-VAPOR-DEPOSITION |
| WOS Research Area | Materials Science |
| WOS Subject | Materials Science, Multidisciplinary |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/16682 |
| Collection | 力学所知识产出(1956-2008) |
| Corresponding Author | Pan, WX (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100080, Peoples R China. |
| Recommended Citation GB/T 7714 | Pan WX,Lv FX,Tang WZ,et al. Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet[J]. Diamond and Related Materials,2000,9,9-10,:1682-1686. |
| APA | 潘文霞.,吕反修.,唐伟忠.,钟国仿.,蒋政.,...&Pan, WX .(2000).Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet.Diamond and Related Materials,9(9-10),1682-1686. |
| MLA | 潘文霞,et al."Carbon transition efficiency and process cost in high-rate, large-area deposition of diamond films by DC arc plasma jet".Diamond and Related Materials 9.9-10(2000):1682-1686. |
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