Technology of Silicon-Based MEMs

IMECH-IR > 力学所知识产出(1956-2008)

	Technology of Silicon-Based MEMs
	Hao YL(郝一龙); Zhang LX(张立宪); Li T(李婷)
Source Publication	机械强度
	2001
Issue	4 Pages:523-526
ISSN	1001-9669
Subject Area	力学
Indexed By	EI ; CSCD
Language	英语
Citation statistics
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/16769
Collection	力学所知识产出(1956-2008)
Recommended Citation GB/T 7714	Hao YL,Zhang LX,Li T. Technology of Silicon-Based MEMs[J]. 机械强度,2001,4,:523-526.
APA	郝一龙,张立宪,&李婷.(2001).Technology of Silicon-Based MEMs.机械强度(4),523-526.
MLA	郝一龙,et al."Technology of Silicon-Based MEMs".机械强度 .4(2001):523-526.

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