Knowledge Management System of Institue of Mechanics, CAS
| Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators | |
Guo JG(郭建刚) ; Zhao YP(赵亚溥); Guo, JG (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
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| Source Publication | Journal of Microelectromechanical Systems
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| 2004 | |
| Volume | 13Issue:6Pages:1027-1035 |
| ISSN | 1057-7157 |
| Abstract | The influence of van der Waals (vdW) and Casimir forces on the stability of the electrostatic torsional nanoelectromechanical systems (NEMS) actuators is analyzed in the paper. With the consideration of vdW and Casimir effects, the dependence of the critical tilting angle and pull-in voltage on the sizes of structure is investigated. And the influence of vdW torque is compared with that of Casimir torque. The modified coefficients of vdW and Casimir torques on the pull-in voltage are, respectively, calculated. When the gap is sufficiently small, pull-in can still take place with arbitrary small angle perturbation because of the action of vdW and Casimir torques even if there is not electrostatic torque. And the critical pull-in gaps for two cases are, respectively, derived. |
| Subject Area | 力学 |
| DOI | 10.1109/JMEMS.2004.838390 |
| Indexed By | SCI ; EI |
| Language | 英语 |
| WOS ID | WOS:000225515100017 |
| WOS Keyword | PULL-IN ; DYNAMIC-BEHAVIOR ; MEMS ; MODEL ; MICROMIRRORS ; SWITCH |
| WOS Research Area | Engineering |
| WOS Subject | Engineering, Electrical & Electronic ; Engineering, Mechanical |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/17103 |
| Collection | 力学所知识产出(1956-2008) |
| Corresponding Author | Guo, JG (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China. |
| Recommended Citation GB/T 7714 | Guo JG,Zhao YP,Guo, JG . Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators[J]. Journal of Microelectromechanical Systems,2004,13,6,:1027-1035. |
| APA | 郭建刚,赵亚溥,&Guo, JG .(2004).Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators.Journal of Microelectromechanical Systems,13(6),1027-1035. |
| MLA | 郭建刚,et al."Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators".Journal of Microelectromechanical Systems 13.6(2004):1027-1035. |
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