Knowledge Management System of Institue of Mechanics, CAS
| Squeeze-film Effects in MEMS Devices with Perforated Plates for Small Amplitude Vibration | |
Feng C(冯闯); Zhao YP(赵亚溥) ; Liu DQ(刘冬青)
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| Source Publication | Microsystem Technologies
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| 2007 | |
| Volume | 13Issue:7Pages:625-633 |
| ISSN | 0946-7076 |
| Abstract | Squeeze-film effects of perforated plates for small amplitude vibration are analyzed through modified Reynolds equation (MRE). The analytical analysis reckons in most important influential factors: compressibility of the air, border effects, and the resistance caused by vertical air flow passing through perforated holes. It is found that consideration of air compressibility is necessary for high operating frequency and small ratio of the plate width to the attenuation length. The analytical results presented in this paper agree with ANSYS simulation results better than that under the air incompressibility assumption. The analytical analysis can be used to estimate the squeeze-film effects causing damping and stiffness added to the system. Since the value of Reynolds number involved in this paper is low (< 1), inertial effects are neglected. |
| Subject Area | 力学 |
| DOI | 10.1007/s00542-006-0285-x |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:000246771800003 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/17164 |
| Collection | 力学所知识产出(1956-2008) 非线性力学国家重点实验室 |
| Recommended Citation GB/T 7714 | Feng C,Zhao YP,Liu DQ. Squeeze-film Effects in MEMS Devices with Perforated Plates for Small Amplitude Vibration[J]. Microsystem Technologies,2007,13,7,:625-633. |
| APA | Feng C,Zhao YP,&Liu DQ.(2007).Squeeze-film Effects in MEMS Devices with Perforated Plates for Small Amplitude Vibration.Microsystem Technologies,13(7),625-633. |
| MLA | Feng C,et al."Squeeze-film Effects in MEMS Devices with Perforated Plates for Small Amplitude Vibration".Microsystem Technologies 13.7(2007):625-633. |
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| File Name/Size | DocType | Version | Access | License | ||
| Squeeze-film Effects（400KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | View Download | |
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