Knowledge Management System of Institue of Mechanics, CAS
| 中频对靶磁控溅射沉积工艺及薄膜特性研究 | |
| 贾军伟 | |
| Thesis Advisor | 潘文霞 |
| 2008 | |
| Degree Grantor | 中国科学院研究生院 |
| Place of Conferral | 北京 |
| Subtype | 硕士 |
| Degree Discipline | 般力学与力学基础 |
| Call Number | 30436 |
| Language | 中文 |
| Document Type | 学位论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/23220 |
| Collection | 力学所知识产出(1956-2008) |
| Recommended Citation GB/T 7714 | 贾军伟. 中频对靶磁控溅射沉积工艺及薄膜特性研究[D]. 北京. 中国科学院研究生院,2008. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 30436.pdf（2221KB） | 开放获取 | -- | Application Full Text | |||
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