Md Simulation Of Dislocation Mobility During Cutting With Diamond Tip On Silicon

doi:10.1016/j.mssp.2008.03.004

IMECH-IR > 力学所知识产出(1956-2008)

	Md Simulation Of Dislocation Mobility During Cutting With Diamond Tip On Silicon
	Tang QH(汤奇恒); Tang, QH (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Source Publication	Materials Science In Semiconductor Processing
	2007
Pages	270-275
ISSN	1369-8001
Abstract	By means of Tersoff and Morse potentials, a three-dimensional molecular dynamics simulation is performed to study atomic force microscopy cutting on silicon monocrystal surface. The interatomic forces between the workpiece and the pin tool and the atoms of workpiece themselves are simulated. Two partial edge dislocations are introduced into workpiece Si, it is found that the motion of dislocations does not occur during the atomic force microscopy cutting processing. Simulation results show that the shear stress acting on dislocations is far below the yield strength of Si. (c) 2008 Elsevier Ltd. All rights reserved.
Keyword	Molecular Dynamics Simulation Atomic Force Microscopy Silicon Dislocation Pin Tool Atomic-force Microscopy Molecular-dynamics Simulation Phase-transformations Shuffle Dislocations Nano-indentation Monocrystals Surface Si Deformation Fracture
DOI	10.1016/j.mssp.2008.03.004
Indexed By	SCI ; EI
Language	英语
WOS ID	WOS:000257894800008
WOS Keyword	ATOMIC-FORCE MICROSCOPY ; MOLECULAR-DYNAMICS SIMULATION ; PHASE-TRANSFORMATIONS ; SHUFFLE DISLOCATIONS ; NANO-INDENTATION ; MONOCRYSTALS ; SURFACE ; SI ; DEFORMATION ; FRACTURE
WOS Research Area	Engineering ; Materials Science ; Physics
WOS Subject	Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
Citation statistics	Cited Times:21[WOS] [WOS Record] [Related Records in WOS]
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/25496
Collection	力学所知识产出(1956-2008)
Corresponding Author	Tang, QH (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Recommended Citation GB/T 7714	Tang QH,Tang, QH . Md Simulation Of Dislocation Mobility During Cutting With Diamond Tip On Silicon[J]. Materials Science In Semiconductor Processing,2007:270-275.
APA	汤奇恒,&Tang, QH .(2007).Md Simulation Of Dislocation Mobility During Cutting With Diamond Tip On Silicon.Materials Science In Semiconductor Processing,270-275.
MLA	汤奇恒,et al."Md Simulation Of Dislocation Mobility During Cutting With Diamond Tip On Silicon".Materials Science In Semiconductor Processing (2007):270-275.

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