Knowledge Management System of Institue of Mechanics, CAS
| Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition | |
Li SH(李帅辉) ; Shu YH(舒勇华); Fan J(樊菁); Fan, J (reprint author), Chinese Acad Sci, Inst Mech, Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
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| Source Publication | Science In China Series E-Technological Sciences
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| 2008 | |
| Pages | 1470-1482 |
| ISSN | 1006-9321 |
| Abstract | Thickness and component distributions of large-area thin films are an issue of international concern in the field of material processing. The present work employs experiments and direct simulation Monte Carlo (DSMC) method to investigate three-dimensional low-density, non-equilibrium jets of yttrium and titanium vapor atoms in an electron-beams physical vapor deposition (EBPVD) system furnished with two or three electron-beams, and obtains their deposition thickness and component distributions onto 4-inch and 6-inch mono-crystal silicon wafers. The DSMC results are found in excellent agreement with our measurements, such as evaporation rates of yttrium and titanium measured in-situ by quartz crystal resonators, deposited film thickness distribution measured by Rutherford backscattering spectrometer (RBS) and surface profilometer and deposited film molar ratio distribution measured by RBS and inductively coupled plasma atomic emission spectrometer (ICP-AES). This can be taken as an indication that a combination of DSMC method with elaborate measurements may be satisfactory for predicting and designing accurately the transport process of EBPVD at the atomic level. |
| Keyword | Electron Beam Physical Vapor Deposition Thin Film Thickness And Species Distributions Vapor Atom Nonequilibrium Transport Monte-carlo-simulation Sphere Model Evaporation |
| DOI | 10.1007/s11431-008-0096-7 |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:000258286000016 |
| WOS Keyword | MONTE-CARLO-SIMULATION ; SPHERE MODEL ; EVAPORATION |
| WOS Research Area | Engineering ; Materials Science |
| WOS Subject | Engineering, Multidisciplinary ; Materials Science, Multidisciplinary |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/25928 |
| Collection | 力学所知识产出(1956-2008) |
| Corresponding Author | Fan, J (reprint author), Chinese Acad Sci, Inst Mech, Lab High Temp Gas Dynam, Beijing 100190, Peoples R China. |
| Recommended Citation GB/T 7714 | Li SH,Shu YH,Fan J,et al. Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition[J]. Science In China Series E-Technological Sciences,2008:1470-1482. |
| APA | 李帅辉,舒勇华,樊菁,&Fan, J .(2008).Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition.Science In China Series E-Technological Sciences,1470-1482. |
| MLA | 李帅辉,et al."Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition".Science In China Series E-Technological Sciences (2008):1470-1482. |
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