IMECH-IR  > 力学所知识产出(1956-2008)
Pull-In Instability Of Micro-Switch Actuators: Model Review
Lin WH(林文惠); Zhao YP(赵亚溥); Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Source PublicationInternational Journal of Nonlinear Sciences and Numerical Simulation
2008
Pages175-183
ISSN1565-1339
AbstractThe existing three widely used pull-in theoretical models (i.e., one-dimensional lumped model, linear supposition model and planar model) are compared with the nonlinear beam mode in this paper by considering both cantilever and fixed-fixed type micro and nano-switches. It is found that the error of the pull-in parameters between one-dimensional lumped model and the nonlinear beam model is large because the denominator of the electrostatic force is minimal when the electrostatic force is computed at the maximum deflection along the beam. Since both the linear superposition model and the slender planar model consider the variation of electrostatic force with the beam's deflection, these two models not only are of the same type but also own little error of the pull-in parameters with the nonlinear beam model, the error brought by these two models attributes to that the boundary conditions are not completely satisfied when computing the numerical integration of the deflection.
KeywordPull-in Micro And Nano-switches Error Estimation Theoretical Models Nanoscale Electrostatic Actuators Van-der-waals Variational Iteration Method Rf Mems Switches Torsional Actuators Microelectromechanical Systems Behavior Parameters Stability Forces
Indexed BySCI
Language英语
WOS IDWOS:000257002700007
WOS KeywordNANOSCALE ELECTROSTATIC ACTUATORS ; VAN-DER-WAALS ; VARIATIONAL ITERATION METHOD ; RF MEMS SWITCHES ; TORSIONAL ACTUATORS ; MICROELECTROMECHANICAL SYSTEMS ; BEHAVIOR ; PARAMETERS ; STABILITY ; FORCES
WOS Research AreaEngineering ; Mathematics ; Mechanics ; Physics
WOS SubjectEngineering, Multidisciplinary ; Mathematics, Applied ; Mechanics ; Physics, Mathematical
Citation statistics
Cited Times:61[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/25980
Collection力学所知识产出(1956-2008)
Corresponding AuthorZhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Recommended Citation
GB/T 7714
Lin WH,Zhao YP,Zhao, YP . Pull-In Instability Of Micro-Switch Actuators: Model Review[J]. International Journal of Nonlinear Sciences and Numerical Simulation,2008:175-183.
APA 林文惠,赵亚溥,&Zhao, YP .(2008).Pull-In Instability Of Micro-Switch Actuators: Model Review.International Journal of Nonlinear Sciences and Numerical Simulation,175-183.
MLA 林文惠,et al."Pull-In Instability Of Micro-Switch Actuators: Model Review".International Journal of Nonlinear Sciences and Numerical Simulation (2008):175-183.
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