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| Nanoindentation of thin-film-substrate system: Determination of film hardness and Young's modulus | |
Chen SH(陈少华) ; Liu L(刘磊); Wang ZQ(王自强); Chen, SH (reprint author), Chinese Acad Sci, Inst Mech, LNM, Beijing 100080, Peoples R China.
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| Source Publication | Acta Mechanica Sinica
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| 2004 | |
| Volume | 20Issue:4Pages:383-392 |
| ISSN | 0567-7718 |
| Abstract | In the present paper, the hardness and Young's modulus of film-substrate systems are determined by means of nanoindentation experiments and modified models. Aluminum film and two kinds of substrates; i.e. glass and silicon, are studied. Nanoindentation XP II and continuous stiffness mode are used during the experiments. In order to avoid the influence of the Oliver and Pharr method used in the experiments, the experiment data are analyzed with the constant Young's modulus assumption and the equal hardness assumption. The volume fraction model (CZ model) proposed by Fabes et al. (1992) is used and modified to analyze the measured hardness. The method proposed by Doerner and Nix (DN formula) (1986) is modified to analyze the measured Young's modulus. Two kinds of modified empirical formula are used to predict the present experiment results and those in the literature, which include the results of two kinds of systems, i.e., a soft film on a hard substrate and a hard film on a soft substrate. In the modified CZ model, the indentation influence angle, phi, is considered as a relevant physical parameter, which embodies the effects of the indenter tip radius, pile-up or sink-in phenomena and deformation of film and substrate. |
| Keyword | Nanoindentation Hardness Young's Modulus Film-substrate System Wear-resistant Coatings Mechanical-properties Indentation Experiments |
| Indexed By | SCI ; EI ; CSCD |
| Language | 英语 |
| WOS ID | WOS:000223688000008 |
| WOS Keyword | WEAR-RESISTANT COATINGS ; MECHANICAL-PROPERTIES ; INDENTATION EXPERIMENTS |
| WOS Research Area | Engineering ; Mechanics |
| WOS Subject | Engineering, Mechanical ; Mechanics |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/33775 |
| Collection | 力学所知识产出(1956-2008) |
| Corresponding Author | Chen, SH (reprint author), Chinese Acad Sci, Inst Mech, LNM, Beijing 100080, Peoples R China. |
| Recommended Citation GB/T 7714 | Chen SH,Liu L,Wang ZQ,et al. Nanoindentation of thin-film-substrate system: Determination of film hardness and Young's modulus[J]. Acta Mechanica Sinica,2004,20,4,:383-392. |
| APA | 陈少华,刘磊,王自强,&Chen, SH .(2004).Nanoindentation of thin-film-substrate system: Determination of film hardness and Young's modulus.Acta Mechanica Sinica,20(4),383-392. |
| MLA | 陈少华,et al."Nanoindentation of thin-film-substrate system: Determination of film hardness and Young's modulus".Acta Mechanica Sinica 20.4(2004):383-392. |
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