Knowledge Management System of Institue of Mechanics, CAS
| Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications | |
Zhang Y(张吟) ; Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
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| Source Publication | Journal of Micromechanics and Microengineering
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| 2007 | |
| Volume | 17Issue:4Pages:753-762 |
| ISSN | 0960-1317 |
| Abstract | The close form solutions of deflections and curvatures for a film-substrate composite structure with the presence of gradient stress are derived. With the definition of more precise kinematic assumption, the effect of axial loading due to residual gradient stress is incorporated in the governing equation. The curvature of film-substrate with the presence of gradient stress is shown to be nonuniform when the axial loading is nonzero. When the axial loading is zero, the curvature expressions of some structures derived in this paper recover the previous ones which assume the uniform curvature. Because residual gradient stress results in both moment and axial loading inside the film-substrate composite structure, measuring both the deflection and curvature is proposed as a safe way to uniquely determine the residual stress state inside a film-substrate composite structure with the presence of gradient stress. |
| Keyword | Thin-films Micromachined Beams Residual-stress Cantilever Beam Stoney Formula Surface Stress Strain Bilayer Systems Model |
| DOI | 10.1088/0960-1317/17/4/012 |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:000245434200018 |
| WOS Keyword | THIN-FILMS ; MICROMACHINED BEAMS ; RESIDUAL-STRESS ; CANTILEVER BEAM ; STONEY FORMULA ; SURFACE STRESS ; STRAIN ; BILAYER ; SYSTEMS ; MODEL |
| WOS Research Area | Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics |
| WOS Subject | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/34009 |
| Collection | 力学所知识产出(1956-2008) |
| Corresponding Author | Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China. |
| Recommended Citation GB/T 7714 | Zhang Y,Zhang, Y . Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications[J]. Journal of Micromechanics and Microengineering,2007,17,4,:753-762. |
| APA | 张吟,&Zhang, Y .(2007).Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications.Journal of Micromechanics and Microengineering,17(4),753-762. |
| MLA | 张吟,et al."Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications".Journal of Micromechanics and Microengineering 17.4(2007):753-762. |
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