Knowledge Management System of Institue of Mechanics, CAS
硅生长过程中磁场对流场及提拉速率的影响 | |
邓谷雨; 陈启生![]() | |
Source Publication | 庆祝中国力学学会成立50周年暨中国力学学会学术大会’2007论文摘要集(下).中国力学学会,2007,p.458 |
2007 | |
Pages | 458 |
Conference Name | 庆祝中国力学学会成立50周年暨中国力学学会学术大会’2007 |
Conference Date | 2007 |
Conference Place | 北京 |
Abstract | <正>通过使用基于非正交网格有限体积法的FLUTRAPP(fluidflowandtransportphenomenaprogram)程序模拟了工业8in单晶硅生长过程。数值模拟结果表明,流场及提拉速率在单晶硅生长 |
Language | 中文 |
Document Type | 会议论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/34256 |
Collection | 力学所知识产出(1956-2008) |
Corresponding Author | 邓谷雨 |
Recommended Citation GB/T 7714 | 邓谷雨,陈启生. 硅生长过程中磁场对流场及提拉速率的影响[C]庆祝中国力学学会成立50周年暨中国力学学会学术大会’2007论文摘要集(下).中国力学学会,2007,p.458,2007:458. |
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