IMECH-IR  > 力学所知识产出(1956-2008)
硅生长过程中磁场对流场及提拉速率的影响
邓谷雨; 陈启生
Source Publication庆祝中国力学学会成立50周年暨中国力学学会学术大会’2007论文摘要集(下).中国力学学会,2007,p.458
2007
Pages458
Conference Name庆祝中国力学学会成立50周年暨中国力学学会学术大会’2007
Conference Date2007
Conference Place北京
Abstract<正>通过使用基于非正交网格有限体积法的FLUTRAPP(fluidflowandtransportphenomenaprogram)程序模拟了工业8in单晶硅生长过程。数值模拟结果表明,流场及提拉速率在单晶硅生长
Language中文
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/34256
Collection力学所知识产出(1956-2008)
Corresponding Author邓谷雨
Recommended Citation
GB/T 7714
邓谷雨,陈启生. 硅生长过程中磁场对流场及提拉速率的影响[C]庆祝中国力学学会成立50周年暨中国力学学会学术大会’2007论文摘要集(下).中国力学学会,2007,p.458,2007:458.
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