等离子体材料加工

IMECH-IR > 力学所知识产出(1956-2008)

	等离子体材料加工
	吴承康
Source Publication	航空制造技术
	1995
Issue	S1 Pages:11-12
ISSN	1000-8756
Abstract	就等离子喷涂及材料合成原理作简单叙述，着重介绍了等离子体材料加工技术在膜层沉积、微电子器件加工及金属熔炼等方面的应用。
Keyword	等离子加工等离子喷涂等离子熔炼气相沉积
Language	中文
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/35110
Collection	力学所知识产出(1956-2008)
Corresponding Author	吴承康
Recommended Citation GB/T 7714	吴承康. 等离子体材料加工[J]. 航空制造技术,1995,S1,:11-12.
APA	吴承康.(1995).等离子体材料加工.航空制造技术(S1),11-12.
MLA	吴承康."等离子体材料加工".航空制造技术 .S1(1995):11-12.

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