深亚微米刻蚀与等离子体源

IMECH-IR > 力学所知识产出(1956-2008)

	深亚微米刻蚀与等离子体源
	吴汉明
Source Publication	中国科学基金
	1996
Issue	1 Pages:31
ISSN	1000-8217
Keyword	等离子体源亚微米刻蚀挑战性问题
Indexed By	CSCD
Language	中文
CSCD ID	CSCD:349821
Citation statistics
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/35428
Collection	力学所知识产出(1956-2008)
Corresponding Author	吴汉明
Recommended Citation GB/T 7714	吴汉明. 深亚微米刻蚀与等离子体源[J]. 中国科学基金,1996,1,:31.
APA	吴汉明.(1996).深亚微米刻蚀与等离子体源.中国科学基金(1),31.
MLA	吴汉明."深亚微米刻蚀与等离子体源".中国科学基金 .1(1996):31.

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