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IMECH-IR  > 力学所知识产出(1956-2008)
感应耦合射频等离子体(英)
朱清文
Source Publication工业加热
1986
Issue4Pages:53-56
ISSN1002-1639
Abstract<正> 本文根据Maher Ⅰ.Boulos的“感应耦合射频等离子体”一文,重点介绍其中的感应耦合射频等离子体的基本原理,主要的设计特点和应用部分。
Keyword感应耦合 射频等离子体 等离子炬 感应等离子体 耦合效率 维持功率 光谱化学 趋肤深度 大气压状态
Language中文
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/37174
Collection力学所知识产出(1956-2008)
Corresponding Author朱清文
Recommended Citation
GB/T 7714		 朱清文. 感应耦合射频等离子体(英)[J]. 工业加热,1986,4,:53-56.
APA 朱清文.(1986).感应耦合射频等离子体(英).工业加热(4),53-56.
MLA 朱清文."感应耦合射频等离子体(英)".工业加热 .4(1986):53-56.
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