Theoretical and experimental studies of the bell-jar-top inductively coupled plasma

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	Theoretical and experimental studies of the bell-jar-top inductively coupled plasma
	Wu HM(吴汉明); Yu BW; Krishnan A; Li M; Yang Y; Yan JP; Yuan DP; Wu, HM (reprint author), CFD RES CORP, HUNTSVILLE, AL 35805 USA.
发表期刊	IEEE Transactions on Plasma Science
	1997
卷号	25 期号:4 页码:776-785
ISSN	0093-3813
摘要	The present paper describes a systematic study of argon plasmas in a bell-jar inductively coupled plasma (ICP) source over the range of pressure 5-20 mtorr and power input 0.2-0.5 kW, Experimental measurements as well as results of numerical simulations are presented. The models used in the study include the well-known global balance model (or the global model) as well as a detailed two-dimensional (2-D) fluid model of the system, The global model is able to provide reasonably accurate values for the global electron temperature and plasma density, The 2-D model provides spatial distributions of various plasma parameters that make it possible to compare with data measured in the experiments, The experimental measurements were obtained using a tuned Langmuir double-probe technique to reduce the RF interference and obtain the light versus current (I-V) characteristics of the probe. Time-averaged electron temperature and plasma density were measured for various combinations of pressure and applied RF power, The predictions of the 2-D model were found to be in good qualitative agreement with measured data, It was found that the electron temperature distribution T-e was more or less uniform in the chamber, It was also seen that the electron temperature depends primarily on pressure, but is almost independent of the power input, except in the very low-pressure regime. The plasma density goes up almost linearly with the power input.
关键词	Experimental Diagnosis Icp 2-d Modeling Energy-distributions Power Deposition Langmuir Probe Density Discharges Model
收录类别	SCI
语种	英语
WOS记录号	WOS:A1997XY53000046
关键词[WOS]	ENERGY-DISTRIBUTIONS ; POWER DEPOSITION ; LANGMUIR PROBE ; DENSITY ; DISCHARGES ; MODEL
WOS研究方向	Physics
WOS类目	Physics, Fluids & Plasmas
引用统计	被引频次：11[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/38992
专题	力学所知识产出(1956-2008)
通讯作者	Wu, HM (reprint author), CFD RES CORP, HUNTSVILLE, AL 35805 USA.
推荐引用方式 GB/T 7714	Wu HM,Yu BW,Krishnan A,et al. Theoretical and experimental studies of the bell-jar-top inductively coupled plasma[J]. IEEE Transactions on Plasma Science,1997,25,4,:776-785.
APA	吴汉明.,Yu BW.,Krishnan A.,Li M.,Yang Y.,...&Wu, HM .(1997).Theoretical and experimental studies of the bell-jar-top inductively coupled plasma.IEEE Transactions on Plasma Science,25(4),776-785.
MLA	吴汉明,et al."Theoretical and experimental studies of the bell-jar-top inductively coupled plasma".IEEE Transactions on Plasma Science 25.4(1997):776-785.

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