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| Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges | |
| Yang Y; Wu HM(吴汉明) | |
| Source Publication | Journal of Applied Physics
 |
| 1996 | |
| Volume | 80Issue:7Pages:3699-3704 |
| ISSN | 0021-8979 |
| Abstract | An efficient method for solving the spatially inhomogeneous Boltzmann equation in a two-term approximation for low-pressure inductively coupled plasmas has been developed. The electron distribution function (EDF), a function of total electron energy and two spatial coordinates, is found self-consistently with the static space-charge potential which is computed from a 2D fluid model, and the rf electric field profile which is calculated from the Maxwell equations. The EDF and the spatial distributions of the electron density, potential, temperature, ionization rate, and the inductive electric field are calculated and discussed. (C) 1996 American Institute of Physics. |
| Keyword | Electron-distribution Function Rf Discharge Glow-discharge Plasma Sources |
| DOI | 10.1063/1.363319 |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:A1996VL80100013 |
| WOS Keyword | ELECTRON-DISTRIBUTION FUNCTION ; RF DISCHARGE ; GLOW-DISCHARGE ; PLASMA SOURCES |
| WOS Research Area | Physics |
| WOS Subject | Physics, Applied |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/39102 |
| Collection | 力学所知识产出(1956-2008) |
| Recommended Citation GB/T 7714 | Yang Y,Wu HM. Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges[J]. Journal of Applied Physics,1996,80,7,:3699-3704. |
| APA | Yang Y,&吴汉明.(1996).Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges.Journal of Applied Physics,80(7),3699-3704. |
| MLA | Yang Y,et al."Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges".Journal of Applied Physics 80.7(1996):3699-3704. |
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| A067.pdf（283KB） | 开放获取 | -- | View Download | |||
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