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| Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma | |
| Yang Y; Wu HM(吴汉明); Yang, Y (reprint author), CHINESE ACAD SCI,INST MECH,BEIJING 100080,PEOPLES R CHINA. | |
| Source Publication | Chinese Physics Letters
 |
| 1996 | |
| Volume | 13Issue:6Pages:447-450 |
| ISSN | 0256-307X |
| Abstract | Based upon the spatially inhomogeneous Boltzmann equation in two-term approximation coupled with electromagnetic and fluid model analysis for the recently developed inductively coupled plasma sources, a self-consistent electron kinetic model is developed. The electron distribution function, spatial distributions of the electron density and ionization rate are calculated and discussed. |
| Keyword | Discharge |
| DOI | 10.1088/0256-307X/13/6/013 |
| Indexed By | SCI ; EI ; CSCD |
| Language | 英语 |
| WOS ID | WOS:A1996VA45300013 |
| WOS Keyword | DISCHARGE |
| WOS Research Area | Physics |
| WOS Subject | Physics, Multidisciplinary |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/39118 |
| Collection | 力学所知识产出(1956-2008) |
| Corresponding Author | Yang, Y (reprint author), CHINESE ACAD SCI,INST MECH,BEIJING 100080,PEOPLES R CHINA. |
| Recommended Citation GB/T 7714 | Yang Y,Wu HM,Yang, Y . Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma[J]. Chinese Physics Letters,1996,13,6,:447-450. |
| APA | Yang Y,吴汉明,&Yang, Y .(1996).Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma.Chinese Physics Letters,13(6),447-450. |
| MLA | Yang Y,et al."Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma".Chinese Physics Letters 13.6(1996):447-450. |
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