Knowledge Management System of Institue of Mechanics, CAS
| Two-dimensional simulation of inductive plasma sources with self-consistent power deposition | |
Li M ; Wu HM(吴汉明); Chen YM
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| Source Publication | IEEE Transactions on Plasma Science (IF:1.325[JCR-2018],1.158[5-Year]) |
| 1995 | |
| Volume | 23Issue:4Pages:558-562 |
| ISSN | 0093-3813 |
| Abstract | A time averaged two-dimensional fluid model including an electromagnetic module with self-consistent power deposition was developed to simulate the transport of a low pressure radio frequency inductively coupled plasma source. Comparsions with experiment and previous simulation results show, that the fluid model is feasible in a certain range of gas pressure. In addition, the effects of gas pressure and power input have been discussed. |
| Keyword | Electron-cyclotron Resonance Energy-distributions Frequency |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:A1995RW96300006 |
| WOS Research Area | Physics |
| WOS Subject | Physics, Fluids & Plasmas |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/39188 |
| Collection | 力学所知识产出(1956-2008) |
| Recommended Citation GB/T 7714 | Li M,Wu HM,Chen YM. Two-dimensional simulation of inductive plasma sources with self-consistent power deposition[J]. IEEE Transactions on Plasma Science,1995,23,4,:558-562. |
| APA | Li M,吴汉明,&Chen YM.(1995).Two-dimensional simulation of inductive plasma sources with self-consistent power deposition.IEEE Transactions on Plasma Science,23(4),558-562. |
| MLA | Li M,et al."Two-dimensional simulation of inductive plasma sources with self-consistent power deposition".IEEE Transactions on Plasma Science 23.4(1995):558-562. |
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| A110.pdf（424KB） | 开放获取 | -- | View Download | |||
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