过滤电弧沉积的TiN／TiCrN／CrN／CrTiN多层膜

IMECH-IR > 力学所知识产出(1956-2008)

	过滤电弧沉积的TiN／TiCrN／CrN／CrTiN多层膜
	李成明; 张勇; 李桂英; 曹尔妍; 吕反修
Source Publication	中国有色金属学报
	2003-02-20
Volume	13 Issue:1 Pages:167-171
ISSN	1004-0609
Abstract	用过滤电弧技术在高速钢表面沉积了TiN/TiCrN/CrN/CrTiN多层膜 ,用扫描电镜 (SEM )观察了截面和断口形貌及划痕后的形貌。使用俄歇电子谱仪进行剥层成分分析 ,用纳米压痕仪测试了多层膜和单层膜的显微硬度和弹性模量。结果表明 ,在调制周期大于 10 0nm时 ,多层膜的显微硬度符合Hall Petch关系 ,在 80nm时 ,则脱离线性关系。划痕法测试多层膜的结合力达到 80N。
Keyword	显微硬度结合力多层膜
Indexed By	CSCD
Language	中文
CSCD ID	CSCD:1292363
Ranking	1
Citation statistics	Cited Times:3[CSCD] [CSCD Record]
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/41720
Collection	力学所知识产出(1956-2008)
Corresponding Author	李成明
Recommended Citation GB/T 7714	李成明,张勇,李桂英,等. 过滤电弧沉积的TiN／TiCrN／CrN／CrTiN多层膜[J]. 中国有色金属学报,2003,13,1,:167-171.
APA	李成明,张勇,李桂英,曹尔妍,&吕反修.(2003).过滤电弧沉积的TiN／TiCrN／CrN／CrTiN多层膜.中国有色金属学报,13(1),167-171.
MLA	李成明,et al."过滤电弧沉积的TiN／TiCrN／CrN／CrTiN多层膜".中国有色金属学报 13.1(2003):167-171.

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