| A precise model for the shape of an adhered microcantilever | |
Zhang Y(张吟) ; Zhao YP(赵亚溥); Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
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| Source Publication | Sensors and Actuators A-Physical
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| 2011 | |
| Volume | 171Issue:2Pages:381-390 |
| ISSN | 0924-4247 |
| Abstract | A variational method using the principle of virtual work (PVW) is presented to formulate the problem of the microcantilever stiction. Compared with the Rayleigh-Ritz method using the arc-shaped or S-shaped deflection, which prescribes the boundary conditions and thus the deflection shape of a stuck cantilever beam, the new method uses the matching conditions and constraint condition derived from PVW and minimization of the system free energy to describe the boundary conditions at the contact separation point. The transition of the beam deflection from an arc-shape-like one to an S-shape-like one with the increase of the beam length is shown by the new model. The (real) beam deflection given by this new model deviates more or less from either an arc-shape or an S-shape, which has significant impact on the interpretation of experimental data. The arc-shaped or S-shaped deflection assumption ignores the beam bending energy inside the contact area and the elastic energy due to the beam/substrate contact, which is inappropriate as shown by this study. Furthermore, the arc-shaped or S-shaped deflection only approximately describes the deflection shape of a stuck beam with zero external load and obviously, the external load changes the beam deflection. The Rayleigh-Ritz method using the arc-shaped or S-shaped deflection assumption in essence can only be used to tell approximately whether stiction occurs or not. Rather than assuming a certain deflection shape and by incorporating the external load, the new method offers a more general and accurate study not only on the microcantilever beam stiction but also on its de-adherence. (C) 2011 Elsevier B.V. All rights reserved. |
| Keyword | Stiction Microcantilever Adhesion Arc-shape S-shape Finite Beam Adhesion Stiction Mems Contact Force Cantilevers Foundation Mechanics Work |
| Subject Area | Engineering ; Instruments & Instrumentation |
| DOI | 10.1016/j.sna.2011.09.001 |
| URL | 查看原文 |
| Indexed By | SCI ; EI |
| Language | 英语 |
| WOS ID | WOS:000297454400045 |
| WOS Keyword | FINITE BEAM ; ADHESION ; STICTION ; MEMS ; CONTACT ; FORCE ; CANTILEVERS ; FOUNDATION ; MECHANICS ; WORK |
| WOS Research Area | Engineering ; Instruments & Instrumentation |
| WOS Subject | Engineering, Electrical & Electronic ; Instruments & Instrumentation |
| Funding Organization | This work is supported by the National Natural Science Foundation of China (NSFC, Grant Nos. 10721202 and 10772180), Ministry of Science and Technology (MOST Grant No. 2010CB631004) and National Basic Research Program of China (973 Program, Grant No. 2007CB310500). |
| Department | LNM纳/微系统力学与物理力学 |
| Classification | 二类/Q1 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/44896 |
| Collection | 非线性力学国家重点实验室 |
| Corresponding Author | Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China |
| Recommended Citation GB/T 7714 | Zhang Y,Zhao YP,Zhang, Y . A precise model for the shape of an adhered microcantilever[J]. Sensors and Actuators A-Physical,2011,171,2,:381-390. |
| APA | 张吟,赵亚溥,&Zhang, Y .(2011).A precise model for the shape of an adhered microcantilever.Sensors and Actuators A-Physical,171(2),381-390. |
| MLA | 张吟,et al."A precise model for the shape of an adhered microcantilever".Sensors and Actuators A-Physical 171.2(2011):381-390. |
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