| Rotating compensator sampling for spectroscopic imaging ellipsometry | |
Meng YH(孟永宏); Jin G(靳刚) ; Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China
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| Source Publication | Thin Solid Films
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| 2011 | |
| Volume | 519Issue:9Pages:2742-2745 |
| ISSN | 0040-6090 |
| Abstract | In this work, a rotating compensator sampling for spectroscopic imaging ellipsometry (SIE) is presented and demonstrated by characterization of a SiO(2) nanofilm pattern on Si substrate. Experiment results within spectrum of 400-700 nm show that the rotating compensator sampling is valid for SIE to obtain the ellipsometric angle distributions psi (x, y, lambda) and Delta (x, y, lambda) over the thin film pattern, the sampling times of psi (x, y) and Delta (x, y) with 576 x 768 pixels under each wavelength is less than 8 s, the precision of fitting thickness of SiO(2) is about 0.2 nm and the lateral resolution is 60.9 mu m x 24.6 mu m in the parallel and perpendicular direction with respect to the incident plane. (C) 2010 Elsevier B.V. All rights reserved. |
| Keyword | Rotating Compensator Spectroscopic Imaging Ellipsometry Spectroscopic Ellipsometry Imaging Ellipsometry Ellipsometry Nanofilm Pattern Microellipsometry Design Layers |
| Subject Area | Materials Science ; Physics |
| DOI | 10.1016/j.tsf.2010.12.131 |
| URL | 查看原文 |
| Indexed By | SCI ; EI |
| Language | 英语 |
| WOS ID | WOS:000289174200038 |
| WOS Keyword | MICROELLIPSOMETRY ; DESIGN ; LAYERS |
| WOS Research Area | Materials Science ; Physics |
| WOS Subject | Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| Department | NML纳米生物光学 |
| Classification | 二类/Q2 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/45098 |
| Collection | 微重力重点实验室 |
| Corresponding Author | Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan W Rd, Beijing 100190, Peoples R China |
| Recommended Citation GB/T 7714 | Meng YH,Jin G,Jin, G . Rotating compensator sampling for spectroscopic imaging ellipsometry[J]. Thin Solid Films,2011,519,9,:2742-2745. |
| APA | 孟永宏,靳刚,&Jin, G .(2011).Rotating compensator sampling for spectroscopic imaging ellipsometry.Thin Solid Films,519(9),2742-2745. |
| MLA | 孟永宏,et al."Rotating compensator sampling for spectroscopic imaging ellipsometry".Thin Solid Films 519.9(2011):2742-2745. |
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