Energy fluctuations in a direct current plasma torch with inter-electrode inserts operated at reduced pressure | |
Huang HJ(黄河激)![]() ![]() ![]() ![]() | |
Source Publication | PLASMA CHEMISTRY AND PLASMA PROCESSING
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2012-02-01 | |
Volume | 32Issue:1Pages:65-74 |
ISSN | 0272-4324 |
Abstract | Direct current (dc) plasma torch with inter-electrode inserts has the merits of fixed arc length, relative high enthalpy and may show advantages in future plasma processes where stability and controllability are must-have. Energy fluctuations in the plasma may result from power supply ripple, arc length variation, and/or acoustic oscillation. Using an improved power supply with a flat waveform, the characteristics of an argon plasma energy instabilities under reduced pressure were studied by means of simultaneously monitoring the arc voltage and arc current spectrum. Dependence of the arc fluctuation behavior on the plasma generating parameters, such as the current intensity, the plasma gas flow rates and the vacuum chamber pressure were investigated and discussed. Results show that the plasma torch has a typical U-shaped voltage-ampere characteristic (VAC). The correlation between the VAC and the probability of energy distributions was studied. Through pressure measurements at the cathode cavity and the vacuum chamber, the existence of sonic flow in the inter-electrode insert channel was confirmed.;Direct current (dc) plasma torch with inter-electrode inserts has the merits of fixed arc length, relative high enthalpy and may show advantages in future plasma processes where stability and controllability are must-have. Energy fluctuations in the plasma may result from power supply ripple, arc length variation, and/or acoustic oscillation. Using an improved power supply with a flat waveform, the characteristics of an argon plasma energy instabilities under reduced pressure were studied by means of simultaneously monitoring the arc voltage and arc current spectrum. Dependence of the arc fluctuation behavior on the plasma generating parameters, such as the current intensity, the plasma gas flow rates and the vacuum chamber pressure were investigated and discussed. Results show that the plasma torch has a typical U-shaped voltage-ampere characteristic (VAC). The correlation between the VAC and the probability of energy distributions was studied. Through pressure measurements at the cathode cavity and the vacuum chamber, the existence of sonic flow in the inter-electrode insert channel was confirmed.;Direct current (dc) plasma torch with inter-electrode inserts has the merits of fixed arc length, relative high enthalpy and may show advantages in future plasma processes where stability and controllability are must-have. Energy fluctuations in the plasma may result from power supply ripple, arc length variation, and/or acoustic oscillation. Using an improved power supply with a flat waveform, the characteristics of an argon plasma energy instabilities under reduced pressure were studied by means of simultaneously monitoring the arc voltage and arc current spectrum. Dependence of the arc fluctuation behavior on the plasma generating parameters, such as the current intensity, the plasma gas flow rates and the vacuum chamber pressure were investigated and discussed. Results show that the plasma torch has a typical U-shaped voltage-ampere characteristic (VAC). The correlation between the VAC and the probability of energy distributions was studied. Through pressure measurements at the cathode cavity and the vacuum chamber, the existence of sonic flow in the inter-electrode insert channel was confirmed. |
Subject Area | 电磁流体力学和等离子体动力学 ; 电磁流体力学和等离子体动力学 ; 电磁流体力学和等离子体动力学 |
URL | 查看原文 |
Indexed By | SCI ; EI |
Language | 英语 |
WOS ID | WOS:000304172300005 |
Funding Organization | This work is supported by the National Natural Science Foundation of China under Grant Nos. 11175226, 50836007 and 10921062. ; This work is supported by the National Natural Science Foundation of China under Grant Nos. 11175226, 50836007 and 10921062. ; This work is supported by the National Natural Science Foundation of China under Grant Nos. 11175226, 50836007 and 10921062. |
Department | LHD应用等离子体力学(CPCR) |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/46380 |
Collection | 高温气体动力学国家重点实验室 |
Corresponding Author | Huang, HJ |
Recommended Citation GB/T 7714 | Huang HJ,Pan WX,Wu CK,et al. Energy fluctuations in a direct current plasma torch with inter-electrode inserts operated at reduced pressure[J]. PLASMA CHEMISTRY AND PLASMA PROCESSING,2012,32,1,:65-74. |
APA | Huang HJ,Pan WX,Wu CK,&Huang, HJ.(2012).Energy fluctuations in a direct current plasma torch with inter-electrode inserts operated at reduced pressure.PLASMA CHEMISTRY AND PLASMA PROCESSING,32(1),65-74. |
MLA | Huang HJ,et al."Energy fluctuations in a direct current plasma torch with inter-electrode inserts operated at reduced pressure".PLASMA CHEMISTRY AND PLASMA PROCESSING 32.1(2012):65-74. |
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