| Flexural contact in MEMS stiction | |
Zhang, Yin ; Zhao, Ya-pu; Zhang, Y; Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China.
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| Source Publication | INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES
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| 2012-09-01 | |
| Volume | 49Issue:17Pages:2203-2214 |
| ISSN | 0020-7683 |
| Abstract | Adhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems (MEMS) device. The competition between the adhesive force and the beam restoring force determines whether the stiction occurs or not. Previous models assume that the stuck beam deforms either as the arc-shape or the S-shape, which causes significant differences in the measurements of adhesion and disputations among researchers. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem;both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolve some disputations on the previous models. The instabilities of jump-in during loading process and jump-off during unloading process are also incorporated in this model.; Adhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems (MEMS) device. The competition between the adhesive force and the beam restoring force determines whether the stiction occurs or not. Previous models assume that the stuck beam deforms either as the arc-shape or the S-shape, which causes significant differences in the measurements of adhesion and disputations among researchers. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem; both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolve some disputations on the previous models. The instabilities of jump-in during loading process and jump-off during unloading process are also incorporated in this model. (C) 2012 Elsevier Ltd. All rights reserved. |
| Keyword | Stiction Contact Mechanics Mems Adhesion Arc-shape S-shape |
| Subject Area | 微机电系统中的固体力学问题 |
| DOI | 10.1016/j.ijsolstr.2012.03.032 |
| URL | 查看原文 |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:000306206600001 |
| WOS Keyword | UNBONDED CONTACT ; STATIC FRICTION ; FINITE BEAM ; ADHESION ; MODEL ; MICROCANTILEVERS ; MECHANICS ; SURFACES ; FORCE ; TRANSITIONS |
| WOS Research Area | Mechanics |
| WOS Subject | Mechanics |
| Funding Organization | National Natural Science Foundation of China (NSFC)(11021262 ; The research has been supported by the National Natural Science Foundation of China (NSFC Nos. 11021262 and 11023001) and Chinese Academy of Sciences (Grant No. KJCX2-EW-L03). ; Chinese Academy of Sciences(KJCX2-EW-L03) ; 11023001) |
| Department | LNM纳/微系统力学与物理力学 |
| Classification | 一类/力学重要期刊 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/46694 |
| Collection | 非线性力学国家重点实验室 |
| Corresponding Author | Zhang, Y; Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China. |
| Affiliation | Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China |
| Recommended Citation GB/T 7714 | Zhang, Yin,Zhao, Ya-pu,Zhang, Y,et al. Flexural contact in MEMS stiction[J]. INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES,2012,49,17,:2203-2214. |
| APA | Zhang, Yin,Zhao, Ya-pu,Zhang, Y,&Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China..(2012).Flexural contact in MEMS stiction.INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES,49(17),2203-2214. |
| MLA | Zhang, Yin,et al."Flexural contact in MEMS stiction".INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES 49.17(2012):2203-2214. |
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