| Fast deposition of diamond-like carbon films by radio frequency hollow cathode method | |
Pang XL; Peng HL; Yang HS ; Gao KW; Wu XL(武晓雷); Volinsky AA; Yang, HS (reprint author), Univ Sci & Technol Beijing, Dept Mat Phys & Chem, Beijing 100083, Peoples R China.
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| Source Publication | THIN SOLID FILMS
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| 2013-05-01 | |
| Volume | 534Pages:226-230 |
| ISSN | 0040-6090 |
| Abstract | Diamond-like carbon (DLC) thin films were deposited on p-type Si (100) substrates by RF hollow cathode method under different RF power and pressure, using ethane as the precursor gas. The deposition rate of 45 nm/min was achieved, almost 4 times higher than by conventional radio frequency plasma enhanced chemical vapor deposition. The mechanism of fast DLC films deposition is attributed to high plasma density in RF hollow cathode method, discussed in this paper. Scanning electron microscopy and Raman spectroscopy were used to investigate the microstructure of DLC films. The film hardness and Young's modulus were measured by nanoindentation. |
| Keyword | Diamond-like Carbon Films Hollow Cathode Deposition Rate Raman Spectra Nanohardness |
| Subject Area | 固体力学 |
| URL | 查看原文 |
| Indexed By | SCI ; EI |
| Language | 英语 |
| WOS ID | WOS:000317736700038 |
| Funding Organization | National Nature Science Foundation of China [51001013, 51271022]; Fok Ying Tung Education Foundation [132001]; Fundamental Research Funds for the Central Universities |
| Department | LNM材料介观力学性能的表征 |
| Classification | 二类/Q2 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/47262 |
| Collection | 非线性力学国家重点实验室 |
| Corresponding Author | Yang, HS (reprint author), Univ Sci & Technol Beijing, Dept Mat Phys & Chem, Beijing 100083, Peoples R China. |
| Recommended Citation GB/T 7714 | Pang XL,Peng HL,Yang HS,et al. Fast deposition of diamond-like carbon films by radio frequency hollow cathode method[J]. THIN SOLID FILMS,2013,534:226-230. |
| APA | Pang XL.,Peng HL.,Yang HS.,Gao KW.,Wu XL.,...&Yang, HS .(2013).Fast deposition of diamond-like carbon films by radio frequency hollow cathode method.THIN SOLID FILMS,534,226-230. |
| MLA | Pang XL,et al."Fast deposition of diamond-like carbon films by radio frequency hollow cathode method".THIN SOLID FILMS 534(2013):226-230. |
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