Knowledge Management System of Institue of Mechanics, CAS
| DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS | |
Wang XB(王小保); Qian J(钱劲) ; Zhang DC(张大成)
| |
| Source Publication | Acta Mechanica Sinica
 |
| 2004 | |
| Issue | 2Pages:152-158 |
| ISSN | 0567-7749 |
| Abstract | Micromachined piezoresistive flowmeters with four different types of sensing struc-tures have been designed,fabricated and tested.Piezoresistors were defined at the end of the sensorsthrough p-diffusion,and their values were about 3.5kΩ.Wheatstone bridge was configured with thepiezoresistors in ... |
| Keyword | Micromachined Flowmeters Bulk-micromachining Piezoresistivity Wheatstone Bridge |
| Indexed By | SCI ; EI ; CSCD |
| Language | 英语 |
| WOS ID | WOS:000221518600007 |
| WOS Research Area | Engineering ; Mechanics |
| WOS Subject | Engineering, Mechanical ; Mechanics |
| Funding Organization | The project supported by the National “973” Project (TG1999033108) ; the National Natural Science Foundation of China (19928205,50131160739 and 10072068) |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/55154 |
| Collection | 力学所知识产出(1956-2008) |
| Recommended Citation GB/T 7714 | Wang XB,Qian J,Zhang DC. DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS[J]. Acta Mechanica Sinica,2004,2,:152-158. |
| APA | 王小保,钱劲,&张大成.(2004).DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS.Acta Mechanica Sinica(2),152-158. |
| MLA | 王小保,et al."DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS".Acta Mechanica Sinica .2(2004):152-158. |
| Files in This Item: | Download All | |||||
| File Name/Size | DocType | Version | Access | License | ||
| jadd125.pdf（992KB） | 开放获取 | CC BY-ND | View Download | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment