| Adhesion-Induced Failure of the Slender MEMS Structures | |
Liu Y; Zhang Y(张吟) ; [email protected]; [email protected]
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| Source Publication | INTERNATIONAL CONFERENCE ON MECHANICAL DESIGN MANUFACTURE AND AUTOMATION ENGINEERING |
| 2014 | |
| Conference Name | International Conference on Mechanical Design Manufacture and Automation Engineering |
| Conference Date | JAN 11-12 2014 |
| Conference Place | Phuket THAILAND |
| Abstract | Adhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems device. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem; both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolves some disputations on the previous models. |
| Keyword | Adhesion Stiction S-shape Arc-shape |
| Department | LNM纳/微系统力学与物理力学 |
| Indexed By | CPCI |
| Language | 英语 |
| Document Type | 会议论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/55361 |
| Collection | 非线性力学国家重点实验室 |
| Corresponding Author | [email protected]; [email protected] |
| Recommended Citation GB/T 7714 | Liu Y,Zhang Y,[email protected],et al. Adhesion-Induced Failure of the Slender MEMS Structures[C]INTERNATIONAL CONFERENCE ON MECHANICAL DESIGN MANUFACTURE AND AUTOMATION ENGINEERING,2014. |
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