| Linear off null working condition for total internal reflection imaging ellipsometry to detect subtle electron density change | |
Jin X; Wang C ; Shen J; Liu W(刘巍); Luo ZR(罗子人); Niu Y(牛宇)
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| Source Publication | Proceedings of SPIE - The International Society for Optical Engineering |
| 2021 | |
| Pages | 117811I |
| Conference Name | 1st Optics Frontier Conference 2021 |
| Conference Date | 24 April 2021 到 26 April 2021 |
| Conference Place | Hangzhou |
| Abstract | Total internal reflection imaging ellipsometry (TIRIE) is widely used in the field of the biological detection due to its high sensitivity and multi-detection capability. Traditionally, the ellipsometric measurement works under the null-off null condition which is insensitive to the small interface variations such as the electron density disturbance at the sensing surface. Thus, we analyze the response of the detected signals under the different working conditions to the ellipsometric parameter variations and optimize the polarization settings to further enhance the TIRIE response to the subtle interface variation in this paper. Furthermore, the relationship between the detected signal and the electron density disturbance is obtained, and the result shows that the detection sensitivity for the subtle interface changes is improved by one hundred times under the optimized working condition. © SPIE. Downloading of the abstract is permitted for personal use only. |
| Keyword | Electron density TIRIE Working conditions |
| URL | 查看原文 |
| Indexed By | EI |
| Language | 英语 |
| Document Type | 会议论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/87802 |
| Collection | 微重力重点实验室 |
| Affiliation | 1.School of Fundamental Physics and Mathematical Sciences, Hangzhou Institute for Advanced Study, University of Chinese Academy of sciences, 1 Xiangshan Branch Alley, Hangzhou, 310024, China 2.NML, Beijing Key Laboratory of Engineered Construction and Mechanobiology, Institute of Mechanics, Chinese Academy of Sciences, 15 Bei-si-huan West Road, Beijing, 100190, China 3.School of Engineering Science, University of Chinese Academy of Science, 19 Yu-quan Road, Beijing, 100049, China 4.Center for Gravitational Wave Experiment, Institute of Mechanics, Chinese Academy of Science, 15 Bei-si-huan West Road, Beijing, 100190, China |
| Recommended Citation GB/T 7714 | Jin X,Wang C,Shen J,et al. Linear off null working condition for total internal reflection imaging ellipsometry to detect subtle electron density change[C]Proceedings of SPIE - The International Society for Optical Engineering,2021:117811I. |
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| File Name/Size | DocType | Version | Access | License | ||
| 117811I.pdf（396KB） | 会议论文 | 开放获取 | CC BY-NC-SA | View Download | ||
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