| Multi-scale indentation model of stiff film-compliant substrate structures | |
Liu, Yanwei; Ma HS(马寒松) ; Long, Hao; Wei, Shiyuan; Zhang, Siyuan; Wei, Yueguang
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| Source Publication | APPLIED MATHEMATICAL MODELLING
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| 2023-06 | |
| Volume | 119Pages:566-585 |
| ISSN | 0307-904X |
| Abstract | As critical components or platforms, stiff film-compliant substrate structures are widely used in micro-electro-mechanical systems (MEMS) and other devices, in which their in-dentation behavior plays an important role. In this work, a multi-scale indentation model (MSI) for stiff film-compliant substrate structures is established based on the strain gradi-ent theory and the surface elastic model. With this model, the indentation size effect of the structure is investigated from three aspects: the load-depth relationship, the distribu-tion of bending moments in the film, and the surface morphology. The results show that the indentation size effect is mainly caused by the characteristic length and the surface residual stress of the film, and it is sensitive to the modulus ratio of the film to the sub-strate but has little relation with Poisson's ratio and the contact radius. Based on the above analysis, two dimensionless numbers are proposed to evaluate the indentation size effect of stiff film-compliant substrate structures. Besides, the predicted bending stiffness by the theoretical model is consistent with the experimental result, which verifies the effective-ness of the MSI model. Our research sheds light on the understanding of the indentation size effect of stiff film-compliant substrate structures and provides theoretical guidance for the design of related devices. (c) 2023 Elsevier Inc. All rights reserved. |
| Keyword | Multi -scale indentation model Stiff film -compliant substrate structures Strain gradient theory Surface elastic model Size effect |
| DOI | 10.1016/j.apm.2023.02.035 |
| Indexed By | SCI ; EI |
| Language | 英语 |
| WOS ID | WOS:000971337900001 |
| Funding Organization | Postdoctoral Science Foundation of China for Innovative Talents [BX20220 0 08] ; National Natural Science Foundation of China [11890681, 12032001, 11521202, 12202007] |
| Classification | 一类 |
| Ranking | 2 |
| Contributor | Wei, YG |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/92237 |
| Collection | 非线性力学国家重点实验室 |
| Affiliation | 1.(Liu Yanwei, Long Hao, Wei Yueguang) Peking Univ Coll Engn Dept Mech & Engn Sci B ESAT Beijing 100871 Peoples R China 2.(Ma Hansong) Chinese Acad Sci Inst Mech State Key Lab Nonlinear Mech Beijing 100190 Peoples R China 3.(Wei Shiyuan) Peking Univ Coll Engn Dept Biomed Engn Beijing 100871 Peoples R China 4.(Wei Shiyuan) Peking Univ China Acad Adv Interdisciplinary Studies Beijing 100871 Peoples R China 5.(Zhang Siyuan) Univ Shanghai Sci & Technol Sch Mech Engn Shanghai 200093 Peoples R China |
| Recommended Citation GB/T 7714 | Liu, Yanwei,Ma HS,Long, Hao,et al. Multi-scale indentation model of stiff film-compliant substrate structures[J]. APPLIED MATHEMATICAL MODELLING,2023,119:566-585.Rp_Au:Wei, YG |
| APA | Liu, Yanwei,马寒松,Long, Hao,Wei, Shiyuan,Zhang, Siyuan,&Wei, Yueguang.(2023).Multi-scale indentation model of stiff film-compliant substrate structures.APPLIED MATHEMATICAL MODELLING,119,566-585. |
| MLA | Liu, Yanwei,et al."Multi-scale indentation model of stiff film-compliant substrate structures".APPLIED MATHEMATICAL MODELLING 119(2023):566-585. |
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| Jp2023Fa036.pdf（3710KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | View Download | |
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