Size-dependent thermal bending of bilayer microbeam based on modified couple stress theory and Timoshenko beam theory | |
Ye X(叶璇); Ma HS(马寒松); Liu XM(刘小明); Wei, Yueguang | |
Source Publication | EUROPEAN JOURNAL OF MECHANICS A-SOLIDS |
2023 | |
Volume | 100Pages:105029 |
ISSN | 0997-7538 |
Abstract | The bilayer microbeam can be assigned with two different thermal expansion coefficients, so that the microbeam can be used as a thermal actuator, which can provide bending with thermal loading. As a microdevice, the size effect plays an important role. In addition, the length height ratio L/h of the microbeam has to be smaller than 20, to provide sufficient support. With this ratio, the shear effect of the beam can not be ignored. In this work, considering both the size and shear effects, we modified the couple stress and Timoshenko beam theories to study the thermal bending of bilayer microbeams. By using the principle of minimum potential energy, we derived the higher-order governing equations under thermal load. Then with specified boundary conditions, we adopted the differential quadrature method to solve the governing equations. Finally, using a bilayer microbeam made of aluminum and polysilicon as an example, we verified effects of transverse shear and beam size. Results show that the size effect on beam stiffness is significant when the beam height is on the order of equivalent length scale (leq). Moreover, considering the transverse shear effect indicates that the lateral deflection of the Timoshenko beam depends on the ratio L/h: as L/h increases, the tip deflection increases and converges to the classical solution. Specifically, for a Timoshenko beam with h/leq = 15, the change in deflection can reach 44.6% when L/h is increased from 5 to 25. |
Keyword | Bilayer beam Thermal actuation Size and shear effect Modified couple stress theory |
DOI | 10.1016/j.euromechsol.2023.105029 |
Indexed By | SCI ; EI |
Language | 英语 |
WOS ID | WOS:001053082100001 |
WOS Research Area | Mechanics |
WOS Subject | Mechanics |
Funding Organization | National Natural Science Foundation of China [12022210, 12032001, 11890681, 11902311, 2018022] ; Youth Innovation Promotion Association CAS [2020-JCJQ-ZD-254] ; National Key Research Development Program of China ; [12272203] |
Classification | 二类/Q1 |
Ranking | 1 |
Contributor | Liu, XM (corresponding author), Chinese Acad Sci, LNM Inst Mech, Beijing 100190, Peoples R China. |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/92658 |
Collection | 非线性力学国家重点实验室 |
Affiliation | 1.{Ye Xuan} Tsinghua Univ Inst Nucl & New Energy Technol Beijing 100084 Peoples R China 2.{Ye Xuan, Ma Hansong, Liu Xiaoming} Chinese Acad Sci LNM Inst Mech Beijing 100190 Peoples R China 3.{Liu Xiaoming} UCAS Sch Engn Sci Beijing 100049 Peoples R China 4.{Wei Yueguang} Peking Univ Coll Engn Beijing 100871 Peoples R China |
Recommended Citation GB/T 7714 | Ye X,Ma HS,Liu XM,et al. Size-dependent thermal bending of bilayer microbeam based on modified couple stress theory and Timoshenko beam theory[J]. EUROPEAN JOURNAL OF MECHANICS A-SOLIDS,2023,100:105029.Rp_Au:Liu, XM (corresponding author), Chinese Acad Sci, LNM Inst Mech, Beijing 100190, Peoples R China. |
APA | 叶璇,马寒松,刘小明,&Wei, Yueguang.(2023).Size-dependent thermal bending of bilayer microbeam based on modified couple stress theory and Timoshenko beam theory.EUROPEAN JOURNAL OF MECHANICS A-SOLIDS,100,105029. |
MLA | 叶璇,et al."Size-dependent thermal bending of bilayer microbeam based on modified couple stress theory and Timoshenko beam theory".EUROPEAN JOURNAL OF MECHANICS A-SOLIDS 100(2023):105029. |
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