Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces | |
Zhang, Yuan; Zhou, Xiaomeng; Zhang, Nian; Zhu, Jiaqi; Bai, Ningning; Hou,Xingyu; Sun, Tao; Li, Gang![]() | |
Corresponding Author | Chen, Yingchun([email protected]) ; Wang, Liu([email protected]) ; Guo, Chuan Fei([email protected]) |
Source Publication | NATURE COMMUNICATIONS
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2024-04-08 | |
Volume | 15Issue:1Pages:11 |
Abstract | Flexible pressure sensors can convert mechanical stimuli to electrical signals to interact with the surroundings, mimicking the functionality of the human skins. Piezocapacitive pressure sensors, a class of most widely used devices for artificial skins, however, often suffer from slow response-relaxation speed (tens of milliseconds) and thus fail to detect dynamic stimuli or high-frequency vibrations. Here, we show that the contact-separation behavior of the electrode-dielectric interface is an energy dissipation process that substantially determines the response-relaxation time of the sensors. We thus reduce the response and relaxation time to similar to 0.04 ms using a bonded microstructured interface that effectively diminishes interfacial friction and energy dissipation. The high response-relaxation speed allows the sensor to detect vibrations over 10 kHz, which enables not only dynamic force detection, but also acoustic applications. This sensor also shows negligible hysteresis to precisely track dynamic stimuli. Our work opens a path that can substantially promote the response-relaxation speed of piezocapacitive pressure sensors into submillisecond range and extend their applications in acoustic range. |
DOI | 10.1038/s41467-024-47408-z |
Indexed By | SCI |
Language | 英语 |
WOS ID | WOS:001198902100014 |
WOS Keyword | HYSTERESIS ; SKIN |
WOS Research Area | Science & Technology - Other Topics |
WOS Subject | Multidisciplinary Sciences |
Funding Project | The work was funded by the National Natural Science Foundation of China (No. T2225017 and 52073138), the Science Technology and Innovation Committee of Shenzhen Municipality (No. JCYJ20210324120202007), the Shenzhen Sci-Tech Fund (No. YTDPT20181011104007),[T2225017] ; The work was funded by the National Natural Science Foundation of China (No. T2225017 and 52073138), the Science Technology and Innovation Committee of Shenzhen Municipality (No. JCYJ20210324120202007), the Shenzhen Sci-Tech Fund (No. YTDPT20181011104007),[52073138] ; National Natural Science Foundation of China[JCYJ20210324120202007] ; Science Technology and Innovation Committee of Shenzhen Municipality[YTDPT20181011104007] ; Shenzhen Sci-Tech Fund[2021B1212040001] ; Guangdong Provincial Key Laboratory Program |
Funding Organization | The work was funded by the National Natural Science Foundation of China (No. T2225017 and 52073138), the Science Technology and Innovation Committee of Shenzhen Municipality (No. JCYJ20210324120202007), the Shenzhen Sci-Tech Fund (No. YTDPT20181011104007), ; National Natural Science Foundation of China ; Science Technology and Innovation Committee of Shenzhen Municipality ; Shenzhen Sci-Tech Fund ; Guangdong Provincial Key Laboratory Program |
Classification | 一类 |
Ranking | 1 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/95842 |
Collection | 非线性力学国家重点实验室 |
Recommended Citation GB/T 7714 | Zhang, Yuan,Zhou, Xiaomeng,Zhang, Nian,et al. Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces[J]. NATURE COMMUNICATIONS,2024,15,1,:11. |
APA | Zhang, Yuan.,Zhou, Xiaomeng.,Zhang, Nian.,Zhu, Jiaqi.,Bai, Ningning.,...&Guo, Chuan Fei.(2024).Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces.NATURE COMMUNICATIONS,15(1),11. |
MLA | Zhang, Yuan,et al."Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces".NATURE COMMUNICATIONS 15.1(2024):11. |
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