IMECH-IR  > 非线性力学国家重点实验室
Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces
Zhang, Yuan; Zhou, Xiaomeng; Zhang, Nian; Zhu, Jiaqi; Bai, Ningning; Hou,Xingyu; Sun, Tao; Li, Gang; Zhao, Lingyu; Chen, Yingchun; Wang L(王柳); Guo, Chuan Fei
Corresponding AuthorChen, Yingchun([email protected]) ; Wang, Liu([email protected]) ; Guo, Chuan Fei([email protected])
Source PublicationNATURE COMMUNICATIONS
2024-04-08
Volume15Issue:1Pages:11
AbstractFlexible pressure sensors can convert mechanical stimuli to electrical signals to interact with the surroundings, mimicking the functionality of the human skins. Piezocapacitive pressure sensors, a class of most widely used devices for artificial skins, however, often suffer from slow response-relaxation speed (tens of milliseconds) and thus fail to detect dynamic stimuli or high-frequency vibrations. Here, we show that the contact-separation behavior of the electrode-dielectric interface is an energy dissipation process that substantially determines the response-relaxation time of the sensors. We thus reduce the response and relaxation time to similar to 0.04 ms using a bonded microstructured interface that effectively diminishes interfacial friction and energy dissipation. The high response-relaxation speed allows the sensor to detect vibrations over 10 kHz, which enables not only dynamic force detection, but also acoustic applications. This sensor also shows negligible hysteresis to precisely track dynamic stimuli. Our work opens a path that can substantially promote the response-relaxation speed of piezocapacitive pressure sensors into submillisecond range and extend their applications in acoustic range.
DOI10.1038/s41467-024-47408-z
Indexed BySCI
Language英语
WOS IDWOS:001198902100014
WOS KeywordHYSTERESIS ; SKIN
WOS Research AreaScience & Technology - Other Topics
WOS SubjectMultidisciplinary Sciences
Funding ProjectThe work was funded by the National Natural Science Foundation of China (No. T2225017 and 52073138), the Science Technology and Innovation Committee of Shenzhen Municipality (No. JCYJ20210324120202007), the Shenzhen Sci-Tech Fund (No. YTDPT20181011104007),[T2225017] ; The work was funded by the National Natural Science Foundation of China (No. T2225017 and 52073138), the Science Technology and Innovation Committee of Shenzhen Municipality (No. JCYJ20210324120202007), the Shenzhen Sci-Tech Fund (No. YTDPT20181011104007),[52073138] ; National Natural Science Foundation of China[JCYJ20210324120202007] ; Science Technology and Innovation Committee of Shenzhen Municipality[YTDPT20181011104007] ; Shenzhen Sci-Tech Fund[2021B1212040001] ; Guangdong Provincial Key Laboratory Program
Funding OrganizationThe work was funded by the National Natural Science Foundation of China (No. T2225017 and 52073138), the Science Technology and Innovation Committee of Shenzhen Municipality (No. JCYJ20210324120202007), the Shenzhen Sci-Tech Fund (No. YTDPT20181011104007), ; National Natural Science Foundation of China ; Science Technology and Innovation Committee of Shenzhen Municipality ; Shenzhen Sci-Tech Fund ; Guangdong Provincial Key Laboratory Program
Classification一类
Ranking1
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Cited Times:38[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/95842
Collection非线性力学国家重点实验室
Recommended Citation
GB/T 7714
Zhang, Yuan,Zhou, Xiaomeng,Zhang, Nian,et al. Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces[J]. NATURE COMMUNICATIONS,2024,15,1,:11.
APA Zhang, Yuan.,Zhou, Xiaomeng.,Zhang, Nian.,Zhu, Jiaqi.,Bai, Ningning.,...&Guo, Chuan Fei.(2024).Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces.NATURE COMMUNICATIONS,15(1),11.
MLA Zhang, Yuan,et al."Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces".NATURE COMMUNICATIONS 15.1(2024):11.
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