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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [3]
Creator
张泰华 [2]
张大成 [1]
张海霞 [1]
王小保 [1]
郇勇 [1]
钱劲 [1]
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Journal ar... [3]
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2003 [3]
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中文 [2]
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微纳电子技术 [3]
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国内刊物 [1]
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纳米压痕和划痕法测定氧化硅薄膜材料的力学特性
期刊论文
微纳电子技术, 2003, 期号: 7-8, 页码: 245-248
Authors:
张海霞
;
张泰华
;
郇勇
Adobe PDF(275Kb)
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View/Download：1447/436
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Submit date：2010/05/03
纳米压痕
纳米划痕
力学特性
氧化硅
热氧化
Lpcvd
Pecvd
大流量压阻式流量传感器的研制
期刊论文
微纳电子技术, 2003, 期号: Z1, 页码: 449-451
Authors:
王小保
;
钱劲
;
张大成
Adobe PDF(189Kb)
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View/Download：483/151
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Submit date：2010/05/03
差压
流量传感器
微机械加工
压敏电阻
纳米硬度计在MEMS力学检测中的应用
期刊论文
微纳电子技术, 2003, 卷号: 40, 期号: 7/8, 页码: 212-214
Authors:
张泰华
Adobe PDF(111Kb)
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View/Download：1005/414
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Submit date：2007/06/15
