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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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宽域飞行工程科学与应... [1]
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Bilek, Mar... [1]
Gu, Jiabin [1]
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Li, Liuhe [1]
许亿 [1]
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2022 [1]
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VACUUM [1]
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Application of positive pulse to extract ions from HiPIMS ionization region
期刊论文
VACUUM, 2022, 卷号: 204, 页码: 11./通讯作者：Li, Liuhe
Authors:
Li, Liuhe
;
Gu, Jiabin
;
Xu Y(许亿)
;
Han, Mingyue
;
Bilek, MarcelaMilenaMarie
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Submit date：2022/12/20
High power impulse magnetron sputtering
(HiPIMS)
Ions extraction method
PIC-MCC simulation
Microscopic mechanism of ions extraction
