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Plasma potential and ion energy characteristics in BP-HiPIMS discharge with double layer 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2024, 卷号: 33, 期号: 10, 页码: 17./通讯作者：Han, Mingyue, Li, Liuhe
Authors:  Luo, Yang;  Han, Mingyue;  Li, Duoduo;  Tang, Ling;  Li, Hua;  Li, Liuhe;  Wang, Weizong;  Deng, Dachen;  Gu, Jiabin;  Li GD(李国栋)
Favorite  |  View/Download：8/0  |  Submit date：2024/11/22
BP-HiPIMS  double layer  ion kinetic energy  plasma potential  global current balance model  
Effect of geometric position on the film properties for a complex-shaped substrate in HiPIMS discharge: Experiment and simulation 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2022, 卷号: 434, 页码: 10./通讯作者：Li Guodong, Li Liuhe
Authors:  Li Hua;  Luo Yang;  Han Mingyue;  Tang Ling;  Gu Jiabin;  Li GD(李国栋);  Deng Dachen;  Liu Hongtao;  Huang Kai;  Li Liuhe
Adobe PDF(7412Kb)  |  Favorite  |  View/Download：322/91  |  Submit date：2022/05/17
HiPIMS  Shadowing effect  Ion dynamics  2D PIC-MCC