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Effect of bias voltage on the erosion performance of TiAlSiN coatings on TC6 substrate by high power impulse magnetron sputtering
期刊论文
SURFACE & COATINGS TECHNOLOGY, 2024, 卷号: 477, 页码: 20./通讯作者：Li, Liuhe, Han, Mingyue
Authors:
Li, Hua
;
Li, Liuhe
;
Wang, Xiaoting
;
Li GD(李国栋)
;
Li, Duoduo
;
Luo, Yang
;
Tang, Ling
;
Han, Mingyue
Favorite
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View/Download：117/0
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Submit date：2024/02/26
Erosion
TiAlSiN
Bias voltage
HiPIMS
Failure mechanism
Application of positive pulse to extract ions from HiPIMS ionization region
期刊论文
VACUUM, 2022, 卷号: 204, 页码: 11./通讯作者：Li, Liuhe
Authors:
Li, Liuhe
;
Gu, Jiabin
;
Xu Y(许亿)
;
Han, Mingyue
;
Bilek, MarcelaMilenaMarie
Adobe PDF(11984Kb)
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View/Download：288/117
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Submit date：2022/12/20
High power impulse magnetron sputtering
(HiPIMS)
Ions extraction method
PIC-MCC simulation
Microscopic mechanism of ions extraction
