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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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先进制造工艺力学实验... [1]
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夏原 [1]
李光 [1]
高方圆 [1]
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2010 [1]
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中文 [1]
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材料热处理学报 [1]
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磁控溅射阴极靶磁场分布的定量评价
期刊论文
材料热处理学报, 2010, 卷号: 31, 期号: 12, 页码: 153-157
Authors:
高方圆
;
李光
;
夏原
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Submit date：2010/05/03
磁控溅射
磁场分布
结构参数
平行率
