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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
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吴书祥 [1]
张玉峰 [1]
李元恒 [1]
杜永昌 [1]
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Journal ar... [1]
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1982 [1]
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中文 [1]
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半导体学报 [1]
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扩硼Si在连续CO_2激光辐照后的特性
期刊论文
半导体学报, 1982, 卷号: 3, 期号: 4, 页码: 340-342
Authors:
李元恒
;
张玉峰
;
吴书祥
;
杜永昌
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Submit date：2009/08/03
连续co_2激光
激光辐照
薄层电阻
扩硼
激光功率密度
辐照后
激光扫描速度
电激活
面密度
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