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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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宽域飞行工程科学与应... [1]
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曾明亮 [1]
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Thesis [1]
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2024 [1]
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中文 [1]
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夏原 [1]
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HiPIMS 金属/气体离子比的调控及其对TiN涂层性能的影响
学位论文
硕士论文，北京: 中国科学院大学, 2024
Authors:
曾明亮
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Submit date：2024/06/03
高功率脉冲磁控溅射
TiN
等离子体特性
离子辐照
残余应力
