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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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Contact Mechanics in Flexural MEMS Stiction
会议论文
第十二届全国物理力学学术会议, 中国广西桂林, 2012/11/12
Authors:
Zhang Y(张吟)
;
Zhao YP(赵亚溥)
Adobe PDF(453Kb)
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View/Download:552/232
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Submit date:2014/01/27
Stiction
Adhesion
Microcantilever
Interface
Stiction of flexural MEMS structures
会议论文
3rd International Conference on Digital Manufacturing and Automation, ICDMA 2012, Guangxi, China, AUG 01-02, 2012
Authors:
Liu Y
;
Zhang Y(张吟)
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Adobe PDF(307Kb)
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View/Download:774/246
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Submit date:2013/02/26
Adhesion
Boundary Conditions
Composite Micromechanics
Manufacture
Stiction
Variational Techniques
Beam Bending
Beam Deflection
Beam Length
Constraint Conditions
Contact Areas
Contact Separation
Elastic Energy
External Loads
Matching Condition
Mems-structure
Micro-cantilevers
Microcantilever Beams
Principle Of Virtual Work
Rayleigh-ritz Methods
s Shape
S-shaped
Significant Impacts
Variational Methods
A precise model for the shape of an adhered microcantilever
期刊论文
Sensors and Actuators A-Physical, 2011, 卷号: 171, 期号: 2, 页码: 381-390
Authors:
Zhang Y(张吟)
;
Zhao YP(赵亚溥)
;
Zhang, Y (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
Adobe PDF(672Kb)
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View/Download:1029/280
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Submit date:2012/04/01
Stiction
Microcantilever
Adhesion
Arc-shape
S-shape
Finite Beam
Adhesion
Stiction
Mems
Contact
Force
Cantilevers
Foundation
Mechanics
Work
Deformation Of Pdms Membrane And Microcantilever By A Water Droplet: Comparison Between Mooney-Rivlin And Linear Elastic Constitutive Models
期刊论文
Journal of Colloid and Interface Science, 2009, 卷号: 332, 期号: 2, 页码: 467-476
Authors:
Yu YS(余迎松)
;
Zhao YP(赵亚溥)
;
Zhao YP
Adobe PDF(1171Kb)
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View/Download:1335/336
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Submit date:2009/08/03
Mooney-rivlin Constitutive Model
Hyperelastic Material
Pdms
Membrane
Surface Tension
Vertical Component
Water Droplet
Microcantilever
Force Microscope Cantilevers
System
Polydimethylsiloxane
Fabrication
Evaporation
Simulation
Micropump
Flow