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Plasma potential and ion energy characteristics in BP-HiPIMS discharge with double layer 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2024, 卷号: 33, 期号: 10, 页码: 17./通讯作者：Han, Mingyue, Li, Liuhe
Authors:  Luo, Yang;  Han, Mingyue;  Li, Duoduo;  Tang, Ling;  Li, Hua;  Li, Liuhe;  Wang, Weizong;  Deng, Dachen;  Gu, Jiabin;  Li GD(李国栋)
Favorite  |  View/Download：7/0  |  Submit date：2024/11/22
BP-HiPIMS  double layer  ion kinetic energy  plasma potential  global current balance model