IMECH-IR  > 力学所知识产出(1956-2008)
(Ga,Mn,As) compounds grown on semi-insulating GaAs with mass-analyzed low energy dual ion beam deposition
Yang JL; Chen NF(陈诺夫); Liu ZK; Yang SY; Chai CL; Liao MY; He HJ
Source PublicationJournal of Crystal Growth
2002
Volume234Issue:2-3Pages:359-363
ISSN0022-0248
AbstractThe (Ga,Mn,As) compounds were obtained by the implantation of Mn ions into semi-insulating GaAs substrate with mass-analyzed low energy dual ion beam deposition technique. Auger electron spectroscopy depth profile of a typical sample grown at the substrate temperature of 250°C showed that the Mn ions were successfully implanted into GaAs substrate with the implantation depth of 160 nm. X-ray diffraction was employed for the structural analyses of all samples. The experimental results were greatly affected by the substrate temperature. Ga5.2Mn was obtained in the sample grown at the substrate temperature of 250°C. Ga5.2Mn, Ga5Mn8 and Mn3Ga were obtained in the sample grown at the substrate temperature of 400°C. However, there is no new phase in the sample grown at the substrate temperature of 200°C. The sample grown at 400°C was annealed at 840°C. In this annealed sample Mn3Ga disappeared, Ga5Mn8 tended to disappear, Ga5.2Mn crystallized better and a new phase of Mn2As was generated.
KeywordX-ray Diffraction
Subject Area微重力流体力学
DOI10.1016/S0022-0248(01)01722-5
Indexed BySCI
Language英语
WOS IDWOS:000173057500013
WOS Research AreaCrystallography ; Materials Science ; Physics
WOS SubjectCrystallography ; Materials Science, Multidisciplinary ; Physics, Applied
Citation statistics
Cited Times:9[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/13635
Collection力学所知识产出(1956-2008)
Recommended Citation
GB/T 7714
Yang JL,Chen NF,Liu ZK,et al. (Ga,Mn,As) compounds grown on semi-insulating GaAs with mass-analyzed low energy dual ion beam deposition[J]. Journal of Crystal Growth,2002,234,2-3,:359-363.
APA Yang JL.,陈诺夫.,Liu ZK.,Yang SY.,Chai CL.,...&He HJ.(2002).(Ga,Mn,As) compounds grown on semi-insulating GaAs with mass-analyzed low energy dual ion beam deposition.Journal of Crystal Growth,234(2-3),359-363.
MLA Yang JL,et al."(Ga,Mn,As) compounds grown on semi-insulating GaAs with mass-analyzed low energy dual ion beam deposition".Journal of Crystal Growth 234.2-3(2002):359-363.
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