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| 真空磁过滤电弧离子镀法制备DLC膜的机械性能 | |
| Alternative Title | Mechanical Properties of DLC Films Deposited by Vacuum Magnetic-filtering Arc Plasma |
张泰华 ; 郇勇; 王秀兰
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| Source Publication | 实验力学
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| 2003 | |
| Volume | 18Issue:1Pages:1-5 |
| ISSN | 1001-4888 |
| Abstract | 采用真空磁过滤电弧离子镀法分别在9Cr18和40CrNiMo钢上沉积厚约为0.2μm的类金刚石（DLC）膜。为了检测成膜质量，分别使用纳米压痕和纳米划痕技术表征钢基材和DLC/基材的机械性能，对这种亚微米厚的膜，纳米压痕技术和纳米划痕技术能提供丰富的近表面的弹塑性变形，断裂和摩擦等的信息。同DLC/40CrNiMo相比。DLC/9Cr18的硬度高和固体润滑效果显著，9Cr18是较为理想的基体材料。 |
| Keyword | 真空磁过滤电弧离子镀 Dlc膜 纳米压痕 纳米划痕 固体润滑 |
| Subject Area | 力学 |
| Indexed By | CSCD |
| Language | 中文 |
| CSCD ID | CSCD:1353589 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/15533 |
| Collection | 力学所知识产出(1956-2008) |
| Recommended Citation GB/T 7714 | 张泰华,郇勇,王秀兰. 真空磁过滤电弧离子镀法制备DLC膜的机械性能[J]. 实验力学,2003,18,1,:1-5. |
| APA | 张泰华,郇勇,&王秀兰.(2003).真空磁过滤电弧离子镀法制备DLC膜的机械性能.实验力学,18(1),1-5. |
| MLA | 张泰华,et al."真空磁过滤电弧离子镀法制备DLC膜的机械性能".实验力学 18.1(2003):1-5. |
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