Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force

doi:10.1016/j.jcis.2008.11.069

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	Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force
	Guo JG(郭建刚); Zhou LJ; Zhao YP(赵亚溥); Zhao YP
发表期刊	Journal of Colloid and Interface Science
	2009
卷号	331 期号:2 页码:458-462
ISSN	0021-9797
摘要	The static and dynamic instabilities of a torsional MEMS/NEMS actuator caused by capillary effects are studied, respectively. An instability number, eta, is defined, and the critical gap distance, g(cr), between the mainplate and the substrate is derived. According to the values of eta and g, the instability criteria of the actuator are presented. The dimensionless motion equation of the MEMS/NEMS torsional actuator is derived when it makes nonlinear oscillation under capillary force. The qualitative analysis of the nonlinear equation is made, and the phase portraits are presented on the phase plane. In addition, the bifurcation phenomena in the system are also analyzed. (C) 2008 Elsevier Inc. All rights reserved.
关键词	Torsional Nems Actuator Capillary Force Instability Bifurcation Nanoscale Electrostatic Actuators Van-der-waals Casimir Force Stability Behavior Plates
DOI	10.1016/j.jcis.2008.11.069
收录类别	SCI
语种	英语
WOS记录号	WOS:000263335700030
关键词[WOS]	NANOSCALE ELECTROSTATIC ACTUATORS ; VAN-DER-WAALS ; CASIMIR FORCE ; STABILITY ; BEHAVIOR ; PLATES
WOS研究方向	Chemistry
WOS类目	Chemistry, Physical
引用统计	被引频次：51[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/26618
专题	非线性力学国家重点实验室
通讯作者	Zhao YP
推荐引用方式 GB/T 7714	Guo JG,Zhou LJ,Zhao YP,et al. Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force[J]. Journal of Colloid and Interface Science,2009,331,2,:458-462.
APA	郭建刚,Zhou LJ,赵亚溥,&Zhao YP.(2009).Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force.Journal of Colloid and Interface Science,331(2),458-462.
MLA	郭建刚,et al."Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force".Journal of Colloid and Interface Science 331.2(2009):458-462.

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