| Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force | |
Guo JG(郭建刚) ; Zhou LJ; Zhao YP(赵亚溥); Zhao YP
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| Source Publication | Journal of Colloid and Interface Science
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| 2009 | |
| Volume | 331Issue:2Pages:458-462 |
| ISSN | 0021-9797 |
| Abstract | The static and dynamic instabilities of a torsional MEMS/NEMS actuator caused by capillary effects are studied, respectively. An instability number, eta, is defined, and the critical gap distance, g(cr), between the mainplate and the substrate is derived. According to the values of eta and g, the instability criteria of the actuator are presented. The dimensionless motion equation of the MEMS/NEMS torsional actuator is derived when it makes nonlinear oscillation under capillary force. The qualitative analysis of the nonlinear equation is made, and the phase portraits are presented on the phase plane. In addition, the bifurcation phenomena in the system are also analyzed. (C) 2008 Elsevier Inc. All rights reserved. |
| Keyword | Torsional Nems Actuator Capillary Force Instability Bifurcation Nanoscale Electrostatic Actuators Van-der-waals Casimir Force Stability Behavior Plates |
| DOI | 10.1016/j.jcis.2008.11.069 |
| Indexed By | SCI |
| Language | 英语 |
| WOS ID | WOS:000263335700030 |
| WOS Keyword | NANOSCALE ELECTROSTATIC ACTUATORS ; VAN-DER-WAALS ; CASIMIR FORCE ; STABILITY ; BEHAVIOR ; PLATES |
| WOS Research Area | Chemistry |
| WOS Subject | Chemistry, Physical |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/26618 |
| Collection | 非线性力学国家重点实验室 |
| Corresponding Author | Zhao YP |
| Recommended Citation GB/T 7714 | Guo JG,Zhou LJ,Zhao YP,et al. Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force[J]. Journal of Colloid and Interface Science,2009,331,2,:458-462. |
| APA | 郭建刚,Zhou LJ,赵亚溥,&Zhao YP.(2009).Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force.Journal of Colloid and Interface Science,331(2),458-462. |
| MLA | 郭建刚,et al."Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force".Journal of Colloid and Interface Science 331.2(2009):458-462. |
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