| 硅生长过程中尖形磁场对流场及提拉速率的影响 | |
| Alternative Title | EFFECT OF THE CUSP MAGNETIC FIELD ON FLOW FIELD AND PULLING RATE DURING SI SINGLE CRYSTAL GROWTH PROCESSES |
陈启生 ; 秦明; 邓谷雨
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| Source Publication | 力学与实践
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| 2009-08-08 | |
| Volume | 31Issue:4Pages:24-27 |
| Abstract | 通过使用基于非正交网格有限体积法的FLUTRAPP(fluid flow and transport phenomena pro-gram)程序模拟了工业8 in单晶硅提拉法生长过程.数值模拟结果表明,流场及提拉速率在单晶硅生长过程中具有振荡特性,提拉速率的振荡周期大约为2 min.尖形磁场的引入能够抑制坩埚中熔体流动的振荡,减小提拉速率的振幅,从而有利于提高所生长单晶的质量. |
| Keyword | 提拉法 单晶硅 流动振荡 提拉速率 |
| Indexed By | CSCD |
| Language | 中文 |
| CSCD ID | CSCD:3669656 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://dspace.imech.ac.cn/handle/311007/33371 |
| Collection | 微重力重点实验室 |
| Corresponding Author | 陈启生 |
| Recommended Citation GB/T 7714 | 陈启生,秦明,邓谷雨. 硅生长过程中尖形磁场对流场及提拉速率的影响[J]. 力学与实践,2009,31,4,:24-27. |
| APA | 陈启生,秦明,&邓谷雨.(2009).硅生长过程中尖形磁场对流场及提拉速率的影响.力学与实践,31(4),24-27. |
| MLA | 陈启生,et al."硅生长过程中尖形磁场对流场及提拉速率的影响".力学与实践 31.4(2009):24-27. |
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