硅生长过程中尖形磁场对流场及提拉速率的影响

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	硅生长过程中尖形磁场对流场及提拉速率的影响
Alternative Title	EFFECT OF THE CUSP MAGNETIC FIELD ON FLOW FIELD AND PULLING RATE DURING SI SINGLE CRYSTAL GROWTH PROCESSES
	陈启生; 秦明; 邓谷雨
Source Publication	力学与实践
	2009-08-08
Volume	31 Issue:4 Pages:24-27
Abstract	通过使用基于非正交网格有限体积法的FLUTRAPP(fluid flow and transport phenomena pro-gram)程序模拟了工业8 in单晶硅提拉法生长过程.数值模拟结果表明,流场及提拉速率在单晶硅生长过程中具有振荡特性,提拉速率的振荡周期大约为2 min.尖形磁场的引入能够抑制坩埚中熔体流动的振荡,减小提拉速率的振幅,从而有利于提高所生长单晶的质量.
Keyword	提拉法单晶硅流动振荡提拉速率
Indexed By	CSCD
Language	中文
CSCD ID	CSCD:3669656
Citation statistics
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/33371
Collection	微重力重点实验室
Corresponding Author	陈启生
Recommended Citation GB/T 7714	陈启生,秦明,邓谷雨. 硅生长过程中尖形磁场对流场及提拉速率的影响[J]. 力学与实践,2009,31,4,:24-27.
APA	陈启生,秦明,&邓谷雨.(2009).硅生长过程中尖形磁场对流场及提拉速率的影响.力学与实践,31(4),24-27.
MLA	陈启生,et al."硅生长过程中尖形磁场对流场及提拉速率的影响".力学与实践 31.4(2009):24-27.

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