强CO_2激光辐照下离子注入Si反射率的动态干涉效应

IMECH-IR > 力学所知识产出(1956-2008)

	强CO_2激光辐照下离子注入Si反射率的动态干涉效应
	李元恒
Source Publication	中国激光
	1982
Volume	9 Issue:8 Pages:498-500,497
ISSN	0258-7025
Abstract	本文从理论和实验研究了连续CO_2激光辐照下磷离子注入Si对He-Ne激光束反射率呈现的动态干涉效应。从反射强度随时间的变化看出,Si片离子注入层固相外延的速率在整个再结晶过程中是不均匀的。
Keyword	动态干涉磷离子注入反射率非晶层辐照 Co_2激光非晶态固相外延 Hene激光
Language	中文
Document Type	期刊论文
Identifier	http://dspace.imech.ac.cn/handle/311007/38104
Collection	力学所知识产出(1956-2008)
Corresponding Author	李元恒
Recommended Citation GB/T 7714	李元恒. 强CO_2激光辐照下离子注入Si反射率的动态干涉效应[J]. 中国激光,1982,9,8,:498-500,497.
APA	李元恒.(1982).强CO_2激光辐照下离子注入Si反射率的动态干涉效应.中国激光,9(8),498-500,497.
MLA	李元恒."强CO_2激光辐照下离子注入Si反射率的动态干涉效应".中国激光 9.8(1982):498-500,497.

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